<?xml version="1.0" encoding="UTF-8"?><!DOCTYPE article  PUBLIC "-//NLM//DTD Journal Publishing DTD v3.0 20080202//EN" "http://dtd.nlm.nih.gov/publishing/3.0/journalpublishing3.dtd"><article xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" dtd-version="3.0" xml:lang="en" article-type="research article"><front><journal-meta><journal-id journal-id-type="publisher-id">OALibJ</journal-id><journal-title-group><journal-title>Open Access Library Journal</journal-title></journal-title-group><issn pub-type="epub">2333-9705</issn><publisher><publisher-name>Scientific Research Publishing</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.4236/oalib.1110482</article-id><article-id pub-id-type="publisher-id">OALibJ-126938</article-id><article-categories><subj-group subj-group-type="heading"><subject>Articles</subject></subj-group><subj-group subj-group-type="Discipline-v2"><subject>Biomedical&amp;Life Sciences</subject><subject> Business&amp;Economics</subject><subject> Chemistry&amp;Materials Science</subject><subject> Computer Science&amp;Communications</subject><subject> Earth&amp;Environmental Sciences</subject><subject> Engineering</subject><subject> Medicine&amp;Healthcare</subject><subject> Physics&amp;Mathematics</subject><subject> Social Sciences&amp;Humanities</subject></subj-group></article-categories><title-group><article-title>
 
 
  Piezoelectric Actuators Application and Hysteresis Modelling: A Brief Survey
 
</article-title></title-group><contrib-group><contrib contrib-type="author" xlink:type="simple"><name name-style="western"><surname>Yazhou</surname><given-names>Yang</given-names></name><xref ref-type="aff" rid="aff1"><sub>1</sub></xref></contrib></contrib-group><aff id="aff1"><label>1</label><addr-line>School of Communication and Electronic Engineering, Jishou University, Jishou, China</addr-line></aff><pub-date pub-type="epub"><day>31</day><month>07</month><year>2023</year></pub-date><volume>10</volume><issue>08</issue><fpage>1</fpage><lpage>36</lpage><history><date date-type="received"><day>6,</day>	<month>July</month>	<year>2023</year></date><date date-type="rev-recd"><day>8,</day>	<month>August</month>	<year>2023</year>	</date><date date-type="accepted"><day>11,</day>	<month>August</month>	<year>2023</year></date></history><permissions><copyright-statement>&#169; Copyright  2014 by authors and Scientific Research Publishing Inc. </copyright-statement><copyright-year>2014</copyright-year><license><license-p>This work is licensed under the Creative Commons Attribution International License (CC BY). http://creativecommons.org/licenses/by/4.0/</license-p></license></permissions><abstract><p>
 
 
  In modern life and production, there exists a global energy crisis, an increasing demand for advanced medical services, and a need to integrate and miniaturize industrial products. The applications based on conventional actuators struggle to cope with crises and growing demands due to their low resolution. To address the above issues, researchers have been working on and developing the excellent properties of piezoelectric materials since the discovery of the piezoelectric effect. Nowadays, piezoelectric actuators (PEAs), which are based on piezoelectric materials, have become widely utilized in energy harvesting, micro-electro-mechanical systems (MEMS), biomedicine and other fields. The control accuracy of PEAs in applications is limited by the inherent hysteresis nonlinearity, which poses a challenge to their applications. Researchers are working on PEAs and their hysteresis models to better serve humans with PEAs. This paper reviews typical applications and classifications of PEAs, typical hysteresis models, and classifications. At the end of the paper, we summarize the steps of the selective hysteresis modelling of PEAs and indicate the critical points of the hysteresis modelling and future research directions. The present paper provides a comprehensive review of classical hysteresis models and PEAs, which is expected to benefit researchers in the field of piezoelectric applications and efficient hysteresis modelling.
 
</p></abstract><kwd-group><kwd>Piezoelectric Applications</kwd><kwd> Piezoelectric Hysteresis Modelling</kwd><kwd> Piezoelectric Actuators</kwd></kwd-group></article-meta></front><body><sec id="s1"><title>1. Introduction</title><p>To solve the global energy scarcity crisis and serious pollution of the ecological environment, and caused by the increase in non-renewable energy consumption [<xref ref-type="bibr" rid="scirp.126938-ref1">1</xref>] , to cope with people’s high requirements for medical treatment [<xref ref-type="bibr" rid="scirp.126938-ref2">2</xref>] , the nanoscale resolution requirements of nano-positioning systems in industrial domains, and the requirements of users for high performance, easy to use, reliability and low cost of industrial products [<xref ref-type="bibr" rid="scirp.126938-ref3">3</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref4">4</xref>] . Traditional fluid, electric, hydraulic, pneumatic, and electromagnetic actuators are challenging to achieve micron/nanometre resolution due to the limitations of the driving source and its volume [<xref ref-type="bibr" rid="scirp.126938-ref5">5</xref>] . Since the discovery of the piezoelectric effect by Curie et al. [<xref ref-type="bibr" rid="scirp.126938-ref6">6</xref>] in 1880, researchers have discovered properties of piezoelectric materials such as high resolution, elevated accuracy, rapid response, low power consumption, tiny size and flexible structural design [<xref ref-type="bibr" rid="scirp.126938-ref7">7</xref>] . Over time, researchers have developed piezoelectric single crystal, piezoelectric polycrystal (ceramic), piezoelectric polymer, piezoelectric polymer composite materials [<xref ref-type="bibr" rid="scirp.126938-ref8">8</xref>] , and PEAs based on the utilization of high-performance piezoelectric materials is prevalent in the field of energy harvesting, MEMS, and biomedicine [<xref ref-type="bibr" rid="scirp.126938-ref9">9</xref>] . <xref ref-type="fig" rid="fig1">Figure 1</xref> illustrates different examples of applications of different PEAs. Various applications based on PEAs provide higher efficiency for human production and life. The study of PEAs is essential for better applications. Furthermore, the immanent hysteresis of PEAs, which is characterized by nonlinear behaviors based on piezoelectric materials can affect the control accuracy of PEAs. Therefore, the study of PEAs’ hysteresis modelling is fundamental to obtaining high-precision hysteresis models of PEAs. It also provides the necessary conditions for high-precision control of PEAs.</p><p>The subsequent sections of the paper are structured as follows. The typical applications of PEAs and the characteristics of various PEAs have been described in Section 2. The typical hysteresis models of a PEAs are presented in Section 3. The general steps for the hysteresis modelling of PEAs have been given in Section 4. The main findings of this paper and points out future innovative directions for high-precision hysteresis modelling have been summarized in Section 5.</p></sec><sec id="s2"><title>2. The Applications of PEAs</title><p>This section presents a comprehensive overview of the common applications of PEAs, including their application background, current status, and operating principles. Additionally, it introduces and classifies the commonly used PEAs in typical applications.</p><sec id="s2_1"><title>2.1. Applications</title><p>The typical applications of PEAs in the fields of energy harvesting, MEMS, biomedicine are first presented, and classifies piezoelectric materials according to their molecular complexity. As shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>, it is divided into piezoelectric single crystal [<xref ref-type="bibr" rid="scirp.126938-ref26">26</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref27">27</xref>] , piezoelectric ceramic [<xref ref-type="bibr" rid="scirp.126938-ref28">28</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref29">29</xref>] , piezoelectric polymer [<xref ref-type="bibr" rid="scirp.126938-ref30">30</xref>] , piezoelectric polymer composite materials [<xref ref-type="bibr" rid="scirp.126938-ref31">31</xref>] . This paper provides readers with a demand-oriented understanding of PEAs, and the introduction of their common applications serves as a reference for researchers.</p><sec id="s2_1_1"><title>2.1.1. Energy Harvesting</title><p>Vibrational energy is also widely found in buildings, human bodies, and vehicles. In order to collect a large amount of mechanical energy, researchers adopted a cantilever energy collector. Then they developed piezoelectric nano powered shoes with piezoelectric plates embedded in the sole, as shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>(a) [<xref ref-type="bibr" rid="scirp.126938-ref1">1</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref32">32</xref>] .</p><p>For energy harvesting, researchers use PEAs to capture mechanical energy from living and natural environments and convert it into electrical energy. Because of conventional wind, hydroelectric and solar power, such technological devices are large, expensive and unsuitable for electronic power supplies. Existing chemical batteries provide unsustainable power and are difficult to recycle. To this end, researchers have developed friction nanogenerators suitable for recovering mechanical energy from human movement and life. As shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>(b), wearable electronic products made of multi-layer flexible piezoelectric materials worn by humans will produce friction when they move [<xref ref-type="bibr" rid="scirp.126938-ref6">6</xref>] . And friction nanogenerators are also self-contained power sources for wearable electronics [<xref ref-type="bibr" rid="scirp.126938-ref33">33</xref>] .</p><p>The environmentally friendly wind energy is abundantly available in nature. Traditional wind conversion devices are not suitable for power micro devices due to their large volume and elevated cost. For researchers, piezoelectric harvesters have been developed to convert wind energy into electricity through mechanical structures [<xref ref-type="bibr" rid="scirp.126938-ref5">5</xref>] . To that end, researchers have developed piezoelectric wind harvesters, which converts wind-to-electricity energy. <xref ref-type="fig" rid="fig1">Figure 1</xref>(c) illustrates the fundamental principle of the piezoelectric wind energy harvester [<xref ref-type="bibr" rid="scirp.126938-ref34">34</xref>] . Researchers will utilize wind turbines to harness natural wind energy and convert it into kinetic energy for rotational motion. When a windmill blade contacts a piezoelectric cantilever, it bends the cantilever and creates vibrations and voltages.</p></sec><sec id="s2_1_2"><title>2.1.2. MEMS Systems</title><p>Recently, with the development of interactive human-machine interfaces in MEMS, it is important to control the machine more accurately and collect the feedback information of the machine. Researchers have developed bending angle piezoelectric sensors made of flexible piezoelectric materials. As shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>(d), sensors based on flexible piezoelectric materials are embedded in the manipulator, which can transmit commands and feedback to the manipulator’s motion state in real-time in the two-way electronic system of human-machine interaction [<xref ref-type="bibr" rid="scirp.126938-ref7">7</xref>] .</p><p>In order to enrich the recreational life of the people by recording sound, Edison [<xref ref-type="bibr" rid="scirp.126938-ref35">35</xref>] invented the phonograph. As shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>(e), researchers used ageing-resistant piezoelectric single crystals for phonograph pickup. When the record is flipped, the stylus produces different deformations depending on the texture of the record, which then generate different currents that pass through the microphone to produce sound waves [<xref ref-type="bibr" rid="scirp.126938-ref36">36</xref>] .</p><p>In the information age, researchers have been devoted to rapid data transmission. The currently available frequency-stable lasers with narrow linewidth exhibit exceptional properties and enjoy widespread utilization. However, to additionally achieve the requirements of narrower linewidth and faster frequency control, researchers have developed a modulator using lithium niobate chip. As shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>(f), the lithium niobate external modulator developed by researchers has less noise and lower voltage than the conventional modulator [<xref ref-type="bibr" rid="scirp.126938-ref9">9</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref37">37</xref>] . MEMS are widely used in human production and life to improve their integration and miniaturization. The researchers used quartz crystal tuning forks as piezoelectric resonators to time MEMS. As shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>(g), the electronic control unit adopts a tuning fork crystal resonator to time and generate clock frequency signals [<xref ref-type="bibr" rid="scirp.126938-ref38">38</xref>] . Robots have experienced significant growth in recent years. However, their effectiveness is limited in certain specialized situations such as disaster site search and rescue, infrastructure monitoring, and reconnaissance missions. In addition, the robot is limited by traditional actuators’ size and manufacturing process. Therefore, the field of microrobots in MEMS has become a research hotspot [<xref ref-type="bibr" rid="scirp.126938-ref39">39</xref>] . As shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>(h), researchers use piezoelectric materials as fly wings [<xref ref-type="bibr" rid="scirp.126938-ref11">11</xref>] . The piezoelectric material vibrates fast at high frequency and outputs enough vibration force to meet the requirements of the miniature robotic fly wing.</p></sec><sec id="s2_1_3"><title>2.1.3. Biomedicine</title><p>As medical research deepens and more advanced medical devices become available, the level of awareness of malignant tumour-related diseases among medical workers is also improving. Current techniques for inducing apoptosis of tumour cells by reactive oxygen species are highly dependent on oxygen in the tumour microenvironment. Therefore, how to generate oxygen in the tumour microenvironment is key to efficient apoptosis of tumour cells. To induce specific cell apoptosis in cancer therapy, barium titanate nanoparticles have been developed based on ultrasonic catalysis and hydrolysis. As shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>(i), ultrasonic piezoelectric catalysis is mainly used in the medical field, and ultrasonic stress-induced asymmetric piezoelectric catalysis of BaO<sub>3</sub>Ti nanoparticles is used to treat hypoxic tumours [<xref ref-type="bibr" rid="scirp.126938-ref21">21</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref40">40</xref>] .</p><p>The internal complexity of living organisms limits the diagnosis and treatment of patients in modern medicine. Researchers have developed ultrasound detectors for medical imaging to assist doctors in diagnosing diseases. Next, the working principle of ultrasonic PEA is introduced. A sound wave is a form of energy transfer of an object in a mechanical vibrational state. The piezoelectric ultrasound transducer exploits the acoustic transmission properties of the object in the mechanical vibrational state to realize the mutual conversion of mechanical and electrical energy [<xref ref-type="bibr" rid="scirp.126938-ref41">41</xref>] . As shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>(j), the principle of a high-frequency ultrasonic instrument is to generate a high-frequency vibration wave by using the piezoelectric effect and then analyse the received vibration wave by using inverse piezoelectric effect and combine it with image processing to obtain the internal detection map of the object [<xref ref-type="bibr" rid="scirp.126938-ref23">23</xref>] . The piezoelectric materials that generate vibration are mainly KNbO<sub>3</sub>-based single crystals [<xref ref-type="bibr" rid="scirp.126938-ref42">42</xref>] .</p><p>Human health and longevity are limited by heart disease, which accounts for one in three deaths worldwide. The most direct and effective way to treat patients with heart disease is with an electronic device implanted in the heart. However, when the battery of an implantable electronic device is depleted, the surgical replacement of the battery poses a significant risk and financial burden to the patient. As a result, researchers have used flexible piezoelectric materials and biodegradable materials to develop self-powered heart monitoring devices attached to human blood vessels [<xref ref-type="bibr" rid="scirp.126938-ref43">43</xref>] . It converts vibrational energy generated by the human body into PEAs and continuously stores it as electrical energy to power heart monitoring devices. As shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>(k), the heart detector can monitor the heart status in real-time [<xref ref-type="bibr" rid="scirp.126938-ref44">44</xref>] . The heart detector is mainly attached to the human heart by biodegradable flexible piezoelectric materials and is self-powered in the human body.</p><p>Deaf individuals experience challenges in communication due to the impairment or absence of cochlear hair cells. Existing cochlear implants struggle to recognize hearing in multiple sound sources. To this end, researchers have developed flexible, high-precision, high-sensitivity sound detection and recognition sensors [<xref ref-type="bibr" rid="scirp.126938-ref45">45</xref>] . As shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>(l), there is a flexible piezoelectric sensor in the acoustic sounder, which is mainly composed of flexible poly (vinylidenefluoride-co-trifluoroethylene) (PVDF-TrFE) piezoelectric sheets [<xref ref-type="bibr" rid="scirp.126938-ref25">25</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref46">46</xref>] .</p><p>In addition to energy harvesting, biomedicine, MEMS, and PEAs are widely utilized in aerospace, precision machining, optical manipulation, and numerous more advanced technologies. With the extensive range of applications of PEAs in precision engineering, engineers and technicians are demanding higher accuracy in PEAs modelling [<xref ref-type="bibr" rid="scirp.126938-ref47">47</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref48">48</xref>] . The distinct characteristics of PEAs vary according to their types. To understand more about PEAs, the following sections further describe typical PEAs.</p></sec></sec><sec id="s2_2"><title>2.2. PEAs</title><p>In addition to the typical applications of PEAs mentioned in the previous section, various types of PEAs are widely employed in precision engineering due to their higher requirements for integration and control accuracy [<xref ref-type="bibr" rid="scirp.126938-ref49">49</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref50">50</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref51">51</xref>] , which facilitates researchers in the field of precision control. PEAs are categorized in this section, and their fundamental operational principles are introduced. As shown in <xref ref-type="fig" rid="fig2">Figure 2</xref>. In this manuscript, PEAs are categorized into conventional actuators, piezoelectric stepping actuators, and multi-degree of freedom (MDOF) actuators based on their design and functionality [<xref ref-type="bibr" rid="scirp.126938-ref52">52</xref>] . The comprehensive types of PEAs mentioned in this section are highly informative for application design and meaningful for further development of PEAs.</p><sec id="s2_2_1"><title>2.2.1. Traditional PEA</title><p>As depicted in <xref ref-type="fig" rid="fig2">Figure 2</xref>(a), conventional PEAs can be categorized into five types. The joint construction of unimorph PEAs involves the insertion of square, circular, annular or cantilevered unimorphs into a multilayer conducting metal electrode.</p><p>Different actuators may undergo shrinkage, expansion or bending in their designated driving directions due to the varying orientations of electric field and polarization, as illustrated in <xref ref-type="fig" rid="fig2">Figure 2</xref>(b). Bimorph actuators are composed of two layers of piezoelectric material, each potentially attached to a metal gasket depending on the situation. Consequently, bimorph actuators can also be stretched/contracted or bent.</p><p>In <xref ref-type="fig" rid="fig2">Figure 2</xref>(c), the piezoelectric tube actuator is formed by longitudinally polarizing a thin cylindrical piezoelectric material and bonding it to an electrode layer. Moreover, the piezoelectric tube actuators can be driven in axial/radial or transverse directions.</p><p>In <xref ref-type="fig" rid="fig2">Figure 2</xref>(d), the multilayer piezoelectric stack actuator drivers employ multiple layers of piezoelectric material stacked on top of each other, with appropriate insulation separating the electrodes. Each layer is solely composed of piezoelectric material, and an electrode layer of the same polarity is connected to the external electrode. The driving range of these drivers varies from a few micrometres to tens of micrometres, while their driving force ranges from hundreds to thousands of newtons [<xref ref-type="bibr" rid="scirp.126938-ref67">67</xref>] . By applying different electric fields to the various piezoelectric layers, multilayer piezoelectric stack actuators can achieve more degrees of freedom and allow for longitudinal or shear displacements [<xref ref-type="bibr" rid="scirp.126938-ref68">68</xref>] .</p><p>In <xref ref-type="fig" rid="fig2">Figure 2</xref>(e), the amplified PEA consists of a bending hinge or compliant mechanism with stacked piezoelectric materials, depending on the design [<xref ref-type="bibr" rid="scirp.126938-ref69">69</xref>] . The elastic deformations generated by the amplified PEAs enable amplified motion to be achieved.</p></sec><sec id="s2_2_2"><title>2.2.2. Stepping PEAs</title><p>In <xref ref-type="fig" rid="fig2">Figure 2</xref>(f), the piezoelectric stepper actuator is capable of producing continuous linear or rotational motion that satisfies the requirements for extensive range and high precision in manipulator applications [<xref ref-type="bibr" rid="scirp.126938-ref60">60</xref>] . Based on either a stack PEA or an amplified PEA as the power source, researchers have proposed an inchworm-inspired PEA that utilizes the crawling principle for clamping feed stepping [<xref ref-type="bibr" rid="scirp.126938-ref70">70</xref>] . To achieve precise control over a wide range, they employ the inchworm-inspired PEA featuring an alternating gripping and driving mechanism. The most commonly utilized types include thrust-type actuators with fixed positions and walking-type actuators with moving positions [<xref ref-type="bibr" rid="scirp.126938-ref71">71</xref>] .</p><p>In <xref ref-type="fig" rid="fig2">Figure 2</xref>(g), the inertial PEAs, also referred to as stick-slip actuators, are depicted. are typically driven by sawtooth waves [<xref ref-type="bibr" rid="scirp.126938-ref72">72</xref>] . These actuators harness the energy generated by the deformation of piezoelectric materials through inertial and frictional forces. Based on different driving modes, researchers have classified them into two types: impact-driven and friction-driven. The former utilizes inertia to displace loads with the aid of static friction force and rapid contraction between loads [<xref ref-type="bibr" rid="scirp.126938-ref73">73</xref>] . The latter, known as a stick-slip PEA, generates its driving force by utilizing the difference in friction during stick-slip motion and rapid contraction [<xref ref-type="bibr" rid="scirp.126938-ref74">74</xref>] .</p><p>The utilization of impact-type load inertia deviates from the primary characteristics of friction-type as depicted in <xref ref-type="fig" rid="fig2">Figure 2</xref>(h). The ultrasonic PEA is primarily distinguished by its employment of high-frequency ultrasonic resonance drive, which endows it with exceptional speed and a broad range of continuous motion. The ultrasonic PEA propels the piezoelectric material to generate high-frequency vibrations through voltage waveforms of travelling and standing waves, which in turn drives the elastic stator on the piezoelectric material to produce an elliptical trajectory. Ultimately, this stator conducts high-frequency excitation ultrasonic waves to either a slider or rotor. The aforementioned process facilitates the implementation of linear and rotational motion with the structure of the piezoelectric ultrasonic actuator [<xref ref-type="bibr" rid="scirp.126938-ref75">75</xref>] .</p></sec><sec id="s2_2_3"><title>2.2.3. Multi Degree Freedom PEAs</title><p>In <xref ref-type="fig" rid="fig2">Figure 2</xref>(i), the MDOF PEA can be connected in series or parallel with a single degree of freedom PEA, stacked PEA, or amplified PEA at a perpendicular angle to each other. Then, depending on the required degree of freedom, a hinge or flexible mechanism is designed to enable MDOF linear or rotational motion. Due to the different actuation modes, MDOF PEAs can be classified into two types: direct actuation and step actuation [<xref ref-type="bibr" rid="scirp.126938-ref76">76</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref77">77</xref>] . The direct-drive MDOF PEAs offer high accuracy as an advantage, yet their range of motion is limited due to the utilization of multi-layer PEAs.</p><p>In <xref ref-type="fig" rid="fig2">Figure 2</xref>(j), inchworm and ultrasonic actuators are commonly used in series or parallel to design multiple degrees of freedom (MDOF) stepping PEAs, which enable a more comprehensive range of motion. The accuracy and travel range of MDOF stepper PEAs depend on the type, precision, and arrangement of the PEAs [<xref ref-type="bibr" rid="scirp.126938-ref78">78</xref>] .</p><p>The typical actuator of this section is used as the foundation mechanism in a typical application shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>. In designing a PEA, the first step is determining the type of piezoelectric material and using a set of constants to assess whether the chosen piezoelectric material can achieve the desired performance. Second, researchers design the mechanism of the PEA and then study the modelling of the PEA [<xref ref-type="bibr" rid="scirp.126938-ref79">79</xref>] . Researchers have sought to better utilize piezoelectric materials in the fields of sensing and micromanipulation. Numerous studies have been conducted on the modelling of PEAs. However, the hysteresis nonlinearity of PEAs limits their application in precision engineering [<xref ref-type="bibr" rid="scirp.126938-ref1">1</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref80">80</xref>] .</p></sec></sec></sec><sec id="s3"><title>3. Hysteresis Models</title><p>The positioning error of practical PEAs can be attributed to either rate-independent or rate-dependent hysteresis, with a maximum magnitude of 15% of the stroke range [<xref ref-type="bibr" rid="scirp.126938-ref81">81</xref>] . To enhance the utilization of PEAs, a comprehensive depiction of the hysteresis model is presented. Hysteresis nonlinearity is an characteristics of piezoelectric materials, and other properties such as multiple mapping, memory, and rate dependence further complicate accurate mathematical modelling of hysteresis characteristics [<xref ref-type="bibr" rid="scirp.126938-ref82">82</xref>] . The nonlinear hysteresis and creep of piezoelectric materials can generate stochastic oscillations, which pose a challenge to their application in high-precision micro displacement systems. Given that piezoelectric devices are utilized for high-precision positioning in dynamic scenarios, the modelling accuracy of a nonlinear dynamic hysteresis system is the primary determinant of its robustness [<xref ref-type="bibr" rid="scirp.126938-ref81">81</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref83">83</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref84">84</xref>] . The non-local memory, consisting of instantaneous input voltage value, historical voltage value, and historical voltage extreme value, exerts an influence on the current output displacement. Moreover, the hysteresis characteristics of piezoelectric materials can be categorized into rate-independent or rate-dependent hysteresis based on input frequency. The nonlinear hysteresis of the PEA is depicted in <xref ref-type="fig" rid="fig3">Figure 3</xref>, where <xref ref-type="fig" rid="fig3">Figure 3</xref>(a) illustrates the voltage input waveform, <xref ref-type="fig" rid="fig3">Figure 3</xref>(b) presents the relationship between voltage amplitude and output displacement, and <xref ref-type="fig" rid="fig3">Figure 3</xref>(c) displays different frequency hysteresis loops at identical voltage. The imprecise control of PEAs results in a system error that can reach up to 15% of its</p><p>stroke. Therefore, scholars are currently focusing on hysteresis modelling and control, as well as further compensation techniques to minimize errors [<xref ref-type="bibr" rid="scirp.126938-ref85">85</xref>] . Hysteresis modelling of PEAs can be broadly classified into two categories: classical basic models and advanced models. Classical hysteresis modelling has been further divided by researchers into phenomenological and physical models based on the macroscopic and microscopic states of piezoelectric materials. Although numerous researchers have made enhancements to the classical model, the focus of this section is to provide readers with a fundamental understanding of the classical model.</p><sec id="s3_1"><title>3.1. Phenomenological Models</title><p>The phenomenon model employs the black-box principle to represent a phenomenon that is either entirely unknown or partially known within a system composed of piezoelectric elements. A mathematical model is developed to capture the mapping relationship between external input and output, thereby accurately fitting the system. Parameters identification method is utilized to determine the unknown parameters and obtain the input or output model. Phenomenon models can be categorized into operator-based, differential equation-based, and rate-dependent models, as illustrated in <xref ref-type="fig" rid="fig4">Figure 4</xref>. The Preisach model [<xref ref-type="bibr" rid="scirp.126938-ref87">87</xref>] , the Krasnosel’ Skii-Pokrovskii (KP) model [<xref ref-type="bibr" rid="scirp.126938-ref88">88</xref>] , and the Prandtl-Ishlinskii (PI) model all belong to the class of operators and are rate-independent. The Duhem, Backlash-like, and Bouc-Wen models are differential equation-based models. In addition, the Dahl model and Polynomial Model are classified as phenomenological models.</p><sec id="s3_1_1"><title>3.1.1. Preisach Model</title><p>After F. Preisach [<xref ref-type="bibr" rid="scirp.126938-ref87">87</xref>] proposed the Preisach model, Krasnosel’skii [<xref ref-type="bibr" rid="scirp.126938-ref88">88</xref>] developed it into a pure mathematical model, and Mayergoyz [<xref ref-type="bibr" rid="scirp.126938-ref89">89</xref>] further generalized it based on its characteristics. The Preisach model is derived from the superposition of relay operators, and the resulting curve can be utilized to depict the hysteresis phenomenon exhibited by PEAs. The nonideal relay operator formula is as follows.</p><p>y ( x ) = { 1 if   x ≥ β 0 if   x ≤ α k if   α &lt; x &lt; β (1)</p><p>This definition of the hysteron indicates that the current value of the complete hysteresis loop is contingent upon the historical record of variable input. The Relay operator of the convention Preisach model is shown in <xref ref-type="fig" rid="fig5">Figure 5</xref>. Because the history value of the hysteresis is nonlinear or the value of the previous position impacts the next output value, the local memory property. Furthermore, when A &lt; x 0 &lt; x &lt; x 1 &lt; C , the displacement is output according to the path of the red line segment, and the nonideal relay operator also has the local memory property.</p><p>The convention Preisach model is represented by N relay operators with weights in parallel [<xref ref-type="bibr" rid="scirp.126938-ref92">92</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref93">93</xref>] . The formula is as follows.</p><p>y ( t ) = ∬ α ≥ β μ ( α , β ) R α β x ( t ) d α d β (2)</p><p>One of the most straightforward approaches to comprehending the Preisach model is through a geometric interpretation assignment to the coordinate plane ( α , β ) . On this plane, each point ( α i , β i ) is associated wit a specific relay hysteron R α i , R β i .</p><p>Each relay can be represented on this so-called Preisach plane with its values [<xref ref-type="bibr" rid="scirp.126938-ref94">94</xref>] . As shown in <xref ref-type="fig" rid="fig6">Figure 6</xref> various trajectories can be obtained by stacking different weights with different rely operators. Then the curve is fitted to simulate the nonlinear hysteresis behaviour of the PEAs.</p></sec><sec id="s3_1_2"><title>3.1.2. KP Model</title><p>Due to the complexity of solving the double integral in the Preisach model, KP model was developed by Bank et al. [<xref ref-type="bibr" rid="scirp.126938-ref96">96</xref>] The KP operator was established based on reliability and a superposition method was employed instead of integration. The KP operator is depicted in <xref ref-type="fig" rid="fig7">Figure 7</xref> [<xref ref-type="bibr" rid="scirp.126938-ref97">97</xref>] .</p><p>The KP model is expressed as follows [<xref ref-type="bibr" rid="scirp.126938-ref100">100</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref101">101</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref102">102</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref103">103</xref>] .</p><p>x ( t ) = ∫ S [ k p ( v , ξ S ) ] ( t ) d μ ( s ) (3)</p><p>where k p ( v , ξ S ) expresses the KP operator as follows.</p><p>[ k p ( v , ξ S ) ] ( t ) = { min ( ξ S , r ( v − s 1 ) ) v ˙ ( t ) &lt; 0 max ( ξ S , r ( v − s 2 ) ) v ˙ ( t ) &gt; 0 k p 0 v ˙ ( t ) = 0 (4)</p><p>where v ( t ) is the input voltage, x ( t ) is displacement output, S is the integral domain.</p></sec><sec id="s3_1_3"><title>3.1.3. PI Model</title><p>PI model is an improvement of Prandtl and Krasnosel ‘skii et al. [<xref ref-type="bibr" rid="scirp.126938-ref104">104</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref105">105</xref>] based on Preisach model. PI model is characterized by the inclusion of play operator or stop operator. As shown in <xref ref-type="fig" rid="fig8">Figure 8</xref>, the PI model principle approximates the mass-spring system. Play operator is defined by.</p><p>y r ( t ) = H r [ v ( t ) , y 0 ] = max { v ( t ) − r , min { v ( t ) + r , y r ( t − ) } } (5)</p><p>where H r is the play operator and the threshold is r, y r ( t − ) is the output at</p><p>the last moment; v ( t ) is the input; y r ( t − ) is the output; initial value is y 0 . PI model is expressed as a weighted sum of finite play operators.</p><p>So it is as follows.</p><p>y ( t ) = ω T H r [ v ( t ) , y 0 ] = ∑ i = 0 n ω i max { v ( t ) − r i , min { v ( t ) + r i , y i ( t − ) } } (6)</p><p>where ω T is the weight and value are nonnegative, the threshold must be 0 = r 0 &lt; r 1 &lt; ⋯ &lt; r n &lt; v max . Observe <xref ref-type="fig" rid="fig9">Figure 9</xref>, and the same can be done by using the stop operator, this paper will not repeat it here.</p></sec><sec id="s3_1_4"><title>3.1.4. Polynomial Model</title><p>Researchers have developed polynomial models based on the control accuracy of PEAs in various application scenarios. Although there is no universal formula,</p><p>hysteresis models using polynomials are all composed of linear functions to obtain polynomials [<xref ref-type="bibr" rid="scirp.126938-ref110">110</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref111">111</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref112">112</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref113">113</xref>] . Examples of such polynomial models include.</p><p>y &#175; i = β 0 + β 1 x i + β 2 x i 2 + ⋯ + β p x i p + ε i ; i = 1 , n (7)</p></sec><sec id="s3_1_5"><title>3.1.5. Bouc-Wen Model</title><p>Wen [<xref ref-type="bibr" rid="scirp.126938-ref114">114</xref>] proposed the Bouc-Wen model based on the differential equation proposed by Bouc [<xref ref-type="bibr" rid="scirp.126938-ref115">115</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref116">116</xref>] .</p><p>The Bouc-Wen model is expressed as follows.</p><p>F ( x , t ) = α k x ( t ) + ( 1 − α ) k z ( t ) (8)</p><p>z ˙ = A x ˙ − β | x ˙ | | z | n − 1 z − λ x ˙ | z | n (9)</p><p>where α is the ratio of the anterior and posterior terms and α ∈ ( 0 , 1 ) , A, β and λ are dimensionless parameter; F ( x , t ) is restoring force; x is the displacement; z is the output.</p></sec><sec id="s3_1_6"><title>3.1.6. Duhem Model</title><p>Coleman and Hodgdon [<xref ref-type="bibr" rid="scirp.126938-ref117">117</xref>] refined Duhem’s [<xref ref-type="bibr" rid="scirp.126938-ref118">118</xref>] differential equation, resulting in the Duhem model which is expressed mathematically as follows.</p><p>d w d t = α | d v d t | [ f ( v ) − w ] + d v d t g ( v ) f ˙ ( x ) &gt; g ( x ) &gt; α e α x ∫ x ∞ | f ˙ ( ε ) − g ( ε ) | e − α ε d ε (10)</p><p>where f ( v ) and g ( v ) are a given continuous function, The former is an odd function that increases monotonically and is piecewise smooth, and the latter is a piecewise smooth continuous even function. Both of them are bounded in their</p><p>domain. f ˙ ( x ) &gt; g ( x ) &gt; α e α x ∫ x ∞ | f ˙ ( ε ) − g ( ε ) | e − α ε d ε is true for any x &gt; 0 . α is a constant, v is the input and w is the output.</p></sec><sec id="s3_1_7"><title>3.1.7. Backlash-Like Model</title><p>Su et al. [<xref ref-type="bibr" rid="scirp.126938-ref119">119</xref>] proposed a dynamic hysteresis backlash model based on first-order differential equation. The expression of the Backlash-like model is as follows.</p><p>p ( v ( t ) ) = { c ( v ( t ) − B ) v ˙ ( t ) &gt; 0 , w ( t ) = c ( v ( t ) − B ) c ( v ( t ) + B ) v ˙ ( t ) &lt; 0 , w ( t ) = c ( v ( t ) + B ) w ( t _ ) v ˙ ( t ) = 0 (11)</p><p>where v ( t ) is the model input, w ( t ) is the model output, c &gt; 0 , B &gt; 0 .</p></sec><sec id="s3_1_8"><title>3.1.8. Dahl Model</title><p>Dahl [<xref ref-type="bibr" rid="scirp.126938-ref120">120</xref>] proposed the Dahl model based on friction phenomenon as follows [<xref ref-type="bibr" rid="scirp.126938-ref121">121</xref>] .</p><p>d F d t = δ | 1 − F F c sgn ( x ˙ ) | i sgn ( 1 − F F c sgn ( x ˙ ) ) (12)</p><p>where F is the static friction, Fc is the sliding friction, x is the output displacement. The slope of the force curve under F = 0 is denoted by δ , and i denotes the different kinds of piezoelectric materials. Both δ and i should be set to 1 when researchers study the hysteresis behaviour of piezoelectric materials.</p><p>The Dahl model is as follows.</p><p>d F d t = d x d t − F F c | d x d t | (13)</p><p>d 2 x d t 2 + γ d x d t + k n x = k v x − k l F (14)</p><p>where v stands for the input voltage, and x stands for the output displacement. k l and Fc determine the shape of the hysteresis loop. The remaining unknowns are model parameters that need to be identified. Because of the existence of differential equations in the Dahl model, the control method can be designed simply in the Dahl model [<xref ref-type="bibr" rid="scirp.126938-ref81">81</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref122">122</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref123">123</xref>] .</p></sec></sec><sec id="s3_2"><title>3.2. Physics-Based Models</title><p>The physical model is based on materials science, thermodynamics, and physics theories. The generation of hysteresis is studied using the theories of electric domain turning, molecular polarization, ferroelectric, and parametric phase transitions. Physical-based models of hysteresis include Ikuta model, Maxwell model, and Jiles-Atherton model.</p><p>Among them, the most representative physical model is the ferromagnetic hysteresis model proposed by Jiles and Atherton [<xref ref-type="bibr" rid="scirp.126938-ref124">124</xref>] in 1986, and the reversible transition mechanism of ferromagnetic materials were analysed in detail. Subsequently, Smith proposed a domain wall model to describe the hysteresis of piezoelectric materials based on the Jiles and Atherton model [<xref ref-type="bibr" rid="scirp.126938-ref125">125</xref>] and published a work on hysteresis genesis and physical modelling of ferromagnetic materials in 2005 [<xref ref-type="bibr" rid="scirp.126938-ref83">83</xref>] . By studying the relationship between stress and strain of SMA materials, Ikuta et al. [<xref ref-type="bibr" rid="scirp.126938-ref84">84</xref>] proposed a mechanical model to describe the hysteresis of SMA.</p><sec id="s3_2_1"><title>3.2.1. Ikuta Model</title><p>The Ikuta model is a sublayer model [<xref ref-type="bibr" rid="scirp.126938-ref126">126</xref>] proposed by Ikuta et al. [<xref ref-type="bibr" rid="scirp.126938-ref127">127</xref>] for SMA. As shown in <xref ref-type="fig" rid="fig1">Figure 1</xref>0, the researchers found that the temperature-martensite fraction exhibits hysteresis loops during the heating and cooling of SMA materials. The Ikuta model uses an exponential function to fit the phase transition in the temperature change process. Equation (17) provides the phase fraction during heating. The phase fraction of SMA materials during heating is shown in Equation (20), and the cooling process is the same [<xref ref-type="bibr" rid="scirp.126938-ref128">128</xref>] .</p></sec><sec id="s3_2_2"><title>3.2.2. Maxwell Model</title><p>The Maxwell model is originally proposed by James C. Maxwell [<xref ref-type="bibr" rid="scirp.126938-ref130">130</xref>] . The hysteresis behaviour of the unloaded PEA can be simulated by an equivalent circuit consisting of n serially connected charge-saturated capacitors (CSC), as illustrated in <xref ref-type="fig" rid="fig1">Figure 1</xref>1. Thus, the governing equation of a PEA is as follow.</p><p>q ˙ ( t ) = { q ˙ ( t ) | q i ( t ) | &lt; Q i 0 | q i ( t ) | ≥ Q i (15)</p><p>q ( t ) = C i u i ( t ) (16)</p><p>u ( t ) = ∑ i n u i ( t ) (17)</p><p>q ( t ) = T x ( t ) (18)</p><p>where q i and u i are the charge stored in the charge-saturated capacitor C S C i and the voltage applied on it, C i and Q i are its capacitance and capability to store charge, x and q are the PEA’s output displacement and the charge stored in it, and T is the electro-mechanical transfer ratio from effective displacement x to charge q.</p></sec><sec id="s3_2_3"><title>3.2.3. Jiles-Atherton Model</title><p>Jiles and Atherton [<xref ref-type="bibr" rid="scirp.126938-ref124">124</xref>] present the ferromagnet hysteresis model in mathematical form based on the concept of domain wall motion. Chen et al. [<xref ref-type="bibr" rid="scirp.126938-ref131">131</xref>] found that the modified Jiles-Atherton model can simulate permanent magnets. The</p><p>modified Jiles-Atherton model can accurately and stably describe the dynamic magnetization behaviour of magnetic particles [<xref ref-type="bibr" rid="scirp.126938-ref132">132</xref>] . Classical Jiles-Atherton model equations as follow [<xref ref-type="bibr" rid="scirp.126938-ref133">133</xref>] .</p><p>M r e v = c ( M a n − M i r r ) (19)</p><p>where M is magnetisation, M r e v is reversible and M i r r is irreversible components. M a n is an hysteretic magnetisation and based on the Langevin function they get the following.</p><p>M a n = M s [ coth ( H e a − a H e ) ] (20)</p><p>With,</p><p>d M i r r d H e = M a n − M i r r k δ (21)</p><p>where H e = H + α M is the effective field experienced by the magnetic domains. The model parameters are M s , a, α , c and k. δ is a directional parameter assuming the value +1 if d H / d t &gt; 0 , otherwise the value is −1. Jiles-Atherton model can be written as follow.</p><p>d M d H = ( 1 − c ) ( d M i r r / d H e ) + c ( d M a n / d H e ) 1 − α ( 1 − c ) ( d M i r r / d H e ) − α c ( d M a n / d H e ) (22)</p></sec></sec><sec id="s3_3"><title>3.3. Other Models</title><p>There are various models of PEAs, including the parabolic model, hyperbolic function model, exponential fitting model, and support vector machine model. This section presents the classical hysteresis model and associated concepts of PEAs. Accuracy requirements of precision control systems and hybrid models have become a new trend in the hysteresis modelling of PEAs [<xref ref-type="bibr" rid="scirp.126938-ref109">109</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref134">134</xref>] , and the specific content will be discussed in Section 4 of this paper.</p><sec id="s3_3_1"><title>3.3.1. Artificial Neural Network Models</title><p>Compared with other models, neural network models have the characteristics of self-learning, self-correction, and high-precision approximation and are widely used in nonlinear system identification and controller design [<xref ref-type="bibr" rid="scirp.126938-ref135">135</xref>] . Because the neural network model can only describe one-to-one mapping [<xref ref-type="bibr" rid="scirp.126938-ref136">136</xref>] , and the piezoelectric transducer has multi-value properties and memory properties, the neural network model cannot be directly used to describe the hysteresis behaviour of the piezoelectric transducer. Generally, the composite algorithm combining neural networks and other methods describes the hysteresis nonlinearity [<xref ref-type="bibr" rid="scirp.126938-ref137">137</xref>] . In addition, Quondam-Antonio et al. [<xref ref-type="bibr" rid="scirp.126938-ref138">138</xref>] used neural networks to model the hysteresis behaviour-related characteristics and were able to reproduce the evolution of the magnetization process under arbitrary excitation waveforms.</p></sec><sec id="s3_3_2"><title>3.3.2. Ellipse Fitting Model</title><p>Some scholars used elliptic curves to describe the hysteresis characteristics of piezoelectric materials because the hysteresis loop is very similar to an ellipse. The hysteresis curve includes a rising and falling curve, similar to a part of an elliptic curve, so Zou et al. [<xref ref-type="bibr" rid="scirp.126938-ref139">139</xref>] use the polar elliptic curve method for modelling. The general equation of an ellipse is:</p><p>A x 2 + B x y + C y 2 + D x + E y + F = 0 (23)</p><p>Define x ′ = x − x 0 , y ′ = y − y 0 , Then the elliptic equation can be rewritten as.</p><p>A ( x − x 0 ) 2 + B ( x − x 0 ) ( y − y 0 ) + C ( y − y 0 ) 2 + f = 0 (24)</p><p>So the solution is:</p><p>A x ′ 2 + B x ′ y ′ + C y ′ + f = 0 (25)</p><p>The standard equation is:</p><p>x ˜ 2 a 2 + y ˜ 2 b 2 = 1 (26)</p><p>The relationship between x ˜ and x ′ as follows.</p><p>{ x ˜ = x ′ cos θ − y ′ sin θ y ˜ = x ′ sin θ − y ′ cos θ (27)</p><p>It can be obtained by combining Equations (25) and (26).</p><p>x ′ cos θ − y ′ sin θ a 2 + x ′ sin θ − y ′ cos θ b 2 (28)</p><p>Each parameter in the equation is obtained by comparing Equation (12) with Equation (17).</p><p>{ A = a 2 sin θ + b 2 cos θ B = 2 ( a 2 + b 2 ) sin θ cos θ C = a 2 cos 2 θ + b 2 sin 2 θ D = − a 2 b 2 (29)</p><p>In this section, typical hysteresis models are briefly introduced and classified. To further investigate the hysteresis model, the hysteresis modelling based on the typical model and other hysteresis models are introduced in the following subsections.</p></sec></sec></sec><sec id="s4"><title>4. Hysteresis Modelling for PEAs</title><p>As can be observed from the aforementioned, a series of actuators based on high-performance piezoelectric materials have emerged. However, the inherent hysteresis of these materials severely constrains their development in the field of high-precision control. To enhance accuracy and design PEAs with greater efficacy, this paper aims to further investigate hysteresis modelling. As illustrated in <xref ref-type="fig" rid="fig1">Figure 1</xref>2, the hysteresis modelling of PEAs can be categorized into decoupling and coupling types based on overall and partial modelling approaches. The hysteresis model of a PEA as part of the PEA model is referred to as decoupling [<xref ref-type="bibr" rid="scirp.126938-ref140">140</xref>] , while hysteresis modelling that does not consider external driver</p><p>environment is known as coupling [<xref ref-type="bibr" rid="scirp.126938-ref141">141</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref142">142</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref143">143</xref>] . During actual decoupling, the PEA is divided into several submodels based on practical situations. The <xref ref-type="fig" rid="fig1">Figure 1</xref>2 serves only as a reference. Coupling hysteresis can be categorized into saturation and unsaturation [<xref ref-type="bibr" rid="scirp.126938-ref144">144</xref>] , dynamic and static [<xref ref-type="bibr" rid="scirp.126938-ref145">145</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref146">146</xref>] , symmetric and asymmetric types [<xref ref-type="bibr" rid="scirp.126938-ref147">147</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref148">148</xref>] . This section, we provide a brief review of contemporary hysteresis modelling techniques for PEAs, with a focus on the correlation model of the inverse hysteresis model. We also attempt to summarize the general steps involved in hysteresis modelling across various approaches.</p><sec id="s4_1"><title>4.1. Inverse of Hysteresis Modelling (IOHM)</title><p>Hysteresis compensation and control during the process of curve linearization modelling for PEAs’ hysteresis characteristics can be found in reference [<xref ref-type="bibr" rid="scirp.126938-ref149">149</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref150">150</xref>] . <xref ref-type="table" rid="table1">Table 1</xref> illustrates the focus of this section on the solution method for IOHM, with references to recent literature. Key components of hysteresis modelling discussed in <xref ref-type="table" rid="table1">Table 1</xref> include classical models, control methods, direct IOHM, direct IOHM and algorithms. The latest advancements in direct IOHM and indirect IOHM are also evaluated. Direct IOHM [<xref ref-type="bibr" rid="scirp.126938-ref151">151</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref152">152</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref153">153</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref154">154</xref>] , in contrast to indirect IOHM, can directly invert the voltage displacement curve to obtain the displacement voltage curve and solve the inverse hysteresis model without solving the hysteresis model first [<xref ref-type="bibr" rid="scirp.126938-ref155">155</xref>] .</p><sec id="s4_1_1"><title>4.1.1. Direct IOHM</title><p>There are many cases where the direct IOHM is employed. In 2012, Guo et al. [<xref ref-type="bibr" rid="scirp.126938-ref164">164</xref>] utilized an enhanced PI model and aimed at the asymmetric inverse hysteresis effect and subsequently employed the adaptive particle swarm optimization (PSO) algorithm to solve the inverse hysteresis model of real-time control. In the same year, Qin et al. [<xref ref-type="bibr" rid="scirp.126938-ref151">151</xref>] found that rate-independent PI model inversion parsing is desirable They employed the inverse PI model as a feedforward controller for a piezoelectric actuated compliant mechanism, obtaining the inverse PI model directly from experimental data. This method avoids solving the inverse of the PI model and is also effective for the rate-dependent PI model. In</p><table-wrap id="table1" ><label><xref ref-type="table" rid="table1">Table 1</xref></label><caption><title> Modelling and compensation methods for piezoelectric hysteresis</title></caption><table><tbody><thead><tr><th align="center" valign="middle" >References</th><th align="center" valign="middle" >Base model</th><th align="center" valign="middle" >Control method</th><th align="center" valign="middle" >Direct IOHM</th><th align="center" valign="middle" >Indirect IOHM</th><th align="center" valign="middle" >Algorithm</th></tr></thead><tr><td align="center" valign="middle" >[<xref ref-type="bibr" rid="scirp.126938-ref156">156</xref>]</td><td align="center" valign="middle" >Modified PI</td><td align="center" valign="middle" >Feedforward</td><td align="center" valign="middle" >Negative</td><td align="center" valign="middle" >Existence</td><td align="center" valign="middle" >Error back-propagation algorithm.</td></tr><tr><td align="center" valign="middle" >[<xref ref-type="bibr" rid="scirp.126938-ref157">157</xref>]</td><td align="center" valign="middle" >Modified Bouc?Wen</td><td align="center" valign="middle" >Feedforward</td><td align="center" valign="middle" >Negative</td><td align="center" valign="middle" >Existence</td><td align="center" valign="middle" >Self-adaptive cooperative PSO algorithm.</td></tr><tr><td align="center" valign="middle" >[<xref ref-type="bibr" rid="scirp.126938-ref158">158</xref>]</td><td align="center" valign="middle" >Data separated by a PI</td><td align="center" valign="middle" >Feedforward</td><td align="center" valign="middle" >Negative</td><td align="center" valign="middle" >Existence</td><td align="center" valign="middle" >A novel differential evolution algorithm.</td></tr><tr><td align="center" valign="middle" >[<xref ref-type="bibr" rid="scirp.126938-ref159">159</xref>]</td><td align="center" valign="middle" >The hysteresis submodel</td><td align="center" valign="middle" >Feedforward</td><td align="center" valign="middle" >Existence</td><td align="center" valign="middle" >Negative</td><td align="center" valign="middle" >Radial basis function neural network.</td></tr><tr><td align="center" valign="middle" >[<xref ref-type="bibr" rid="scirp.126938-ref160">160</xref>]</td><td align="center" valign="middle" >Temperature-dependent asymmetric PI</td><td align="center" valign="middle" >Feedback</td><td align="center" valign="middle" >Negative</td><td align="center" valign="middle" >Existence</td><td align="center" valign="middle" >Parameter estimation algorithm.</td></tr><tr><td align="center" valign="middle" >[<xref ref-type="bibr" rid="scirp.126938-ref85">85</xref>]</td><td align="center" valign="middle" >Rate-dependent asymmetric hysteresis PI</td><td align="center" valign="middle" >Robust adaptive controller</td><td align="center" valign="middle" >Negative</td><td align="center" valign="middle" >Negative</td><td align="center" valign="middle" >Improved genetic algorithm.</td></tr><tr><td align="center" valign="middle" >[<xref ref-type="bibr" rid="scirp.126938-ref161">161</xref>]</td><td align="center" valign="middle" >Least-squares support-vector machines based on nonlinear autoregressive exogenous</td><td align="center" valign="middle" >Incremental PID controller</td><td align="center" valign="middle" >Negative</td><td align="center" valign="middle" >Existence</td><td align="center" valign="middle" >PSO algorithm. Least-squares support-vector machines regression algorithm.</td></tr><tr><td align="center" valign="middle" >[<xref ref-type="bibr" rid="scirp.126938-ref162">162</xref>]</td><td align="center" valign="middle" >Back propagation neural network</td><td align="center" valign="middle" >PID</td><td align="center" valign="middle" >Negative</td><td align="center" valign="middle" >Existence</td><td align="center" valign="middle" >Adaptive particle swarm algorithm.</td></tr><tr><td align="center" valign="middle" >[<xref ref-type="bibr" rid="scirp.126938-ref163">163</xref>]</td><td align="center" valign="middle" >Hybrid static hysteresis</td><td align="center" valign="middle" >Feedforward</td><td align="center" valign="middle" >Negative</td><td align="center" valign="middle" >Existence</td><td align="center" valign="middle" >PSO algorithm.</td></tr></tbody></table></table-wrap><p>2017, Ko et al. [<xref ref-type="bibr" rid="scirp.126938-ref165">165</xref>] proposed a generalized PI model-based inverse feedforward compensation approach for addressing asymmetric hysteresis nonlinearity. In 2020, Lallart et al. [<xref ref-type="bibr" rid="scirp.126938-ref166">166</xref>] proposed a system-level inverse method to simulate the quasi-static hysteresis of a PEA and demonstrated it on a piezoelectric transducer. This approach for solving the direct inverse model of the direct hysteresis model is well-suited for implementation in embedded control systems. In 2021, Qin et al. [<xref ref-type="bibr" rid="scirp.126938-ref154">154</xref>] achieved high-precision hysteresis compensation over a more comprehensive frequency range. They used the direct inverse modelling method to build a multilayer feedforward neural network inverse model as a feedforward lag compensator. In the same period, Zhang et al. [<xref ref-type="bibr" rid="scirp.126938-ref167">167</xref>] aimed to enhance the precision of piezoelectric fast steering mirror’s swing. They proposed the Hammerstein dynamic inverse hysteresis model for PEAs. In addition to this, the authors employed the generalized Bouc-Wen inverse model to characterize static nonlinearity and utilized the autoregressive exogenous model to capture rate dependence. The hybrid model parameters are then identified through employment of the adaptive PSO algorithm. This method avoids the complex inverse process of the Bouc-Wen model and is suitable for rate-dependent and asymmetric hysteresis behaviour. In 2022, Nguyen Ngoc Son et al. [<xref ref-type="bibr" rid="scirp.126938-ref168">168</xref>] proposed neuroevolutionary adaptive sliding mode control for solving piezoelectric ceramic actuators’ nonlinearity. They utilized the neuroevolution model to identify the inverse hysteresis model of piezoelectric ceramic actuators, and employed both differential evolution algorithm and Jaya algorithm for global and local optimization respectively. In the same period, Nie et al. [<xref ref-type="bibr" rid="scirp.126938-ref85">85</xref>] proposed a rate-dependent asymmetric hysteresis model based on the PI model. They introduced the dynamic envelope function year into the Play operator, which has a simple structure and few parameters.</p></sec><sec id="s4_1_2"><title>4.1.2. Indirect IOHM</title><p>In 2006, to solve the problem that there is no inverse of the PI operator when the PI model is not positive definite, Tan et al. [<xref ref-type="bibr" rid="scirp.126938-ref169">169</xref>] extended the PI operator and then calculated the inverse hysteresis PI model for feedforward controller. As early as 2009, Yang et al. [<xref ref-type="bibr" rid="scirp.126938-ref170">170</xref>] adopted Preisach and BP neural networks and used a linear interpolation algorithm. In 2016, the identification of at least ten parameters is required for the PI model, so Gan et al. [<xref ref-type="bibr" rid="scirp.126938-ref171">171</xref>] combined quadratic polynomials and linear equations to identify only four parameters and solve the PEA hysteresis model. Finally, the IOHM is obtained and applied to real-time hybrid control. In 2018, Janaideh et al. [<xref ref-type="bibr" rid="scirp.126938-ref172">172</xref>] proposed a solution to address the saturation and asymmetric energy phenomena observed in PEA under high-frequency excitation and numerous inputs. With the rate-dependent PI model and a dead-zone operator as feedforward compensator, an inverse model for real-time compensation is established to effectively suppress asymmetric nonlinear hysteresis. In 2019, Tao et al. [<xref ref-type="bibr" rid="scirp.126938-ref173">173</xref>] order to solve the problem that the nano-positioning platform’s positioning accuracy is subject to hysteresis effects. The hysteresis is modeled using a Gaussian process, and the parameters are determined through the integration of a differential evolution algorithm and Bayesian inference. The outputs based on the Gaussian process hysteresis model are then interleaved to obtain the inverse model as a feedforward compensator. This method is suitable for nonlinear, memory, and rate-dependent. hysteresis modelling. In 2020, Janaideh et al. [<xref ref-type="bibr" rid="scirp.126938-ref174">174</xref>] to mitigate the impact of temperature on the precise positioning of piezoelectric tube actuators. The simultaneous modelling of hysteresis nonlinearity and temperature effects is undertaken. Two different temperature-dependent Prandtl-Ishlinskii models are proposed, which are solved by MATLAB-Simulink and Grey Wolf optimization algorithms, respectively. The inverse model of the temperature-dependent Prandtl-Ishlinskii model is derived and utilized as a feedforward controller to compensate for the hysteresis nonlinearity exhibited by the piezoelectric tubular actuator. To improve the classical Preisach model, The dynamic hysteresis model has been presented by Chen et al. [<xref ref-type="bibr" rid="scirp.126938-ref145">145</xref>] . It is based on the classical Preisach model, and the dynamic term is introduced and solved numerically. The dynamic inverse model is ultimately implemented as the feedforward controller. In 2020, to address the limitation of the PI model in describing asymmetric hysteresis, Wang et al. [<xref ref-type="bibr" rid="scirp.126938-ref175">175</xref>] proposed the polynomial-modified Prandtl-Ishlinskii (PMPI) model that can describe both asymmetric and symmetric hysteresis. They used a modified-play operator and memoryless polynomial to form the PMPI model. They used a differential evolution algorithm and a simplex algorithm to identify the parameters of the PMPI model. Global and local optima are then obtained to search the hysteresis model in the design into an inverse model feedforward compensator. In 2021, The piezoelectric sensor-actuator was designed by Shan et al. [<xref ref-type="bibr" rid="scirp.126938-ref176">176</xref>] and applied to a micro-high precision integrated system. They proposed nonlinear and inverse models based on dynamic hysteresis using quasi-static models and linear transfer functions. Based on classical hysteresis modelling, it is typically necessary to optimize the algorithm within the model in order to enhance its modelling accuracy. Hysteresis modelling based on the hybrid model is usually divided into direct IOHM and indirect IOHM. The former solves the inverse model of the hybrid model as a feedforward controller, followed by the series hysteresis model. Its characteristic is that the choice of the hysteresis model must be able to solve the inverse analysis, the inverse hysteresis accuracy depends on the hysteresis model accuracy, and the structure is simple. The latter is to solve the direct inverse model using the known output input data as a feedforward compensator and then concatenate the hysteresis models. Its characteristics are that it can be modelled based on irreversible hysteresis, the direct inverse hysteresis model is not associated with the hysteresis model, and it has many parameters. In the last decade, due to the diversity of ideas for PEA hysteresis modelling.</p></sec></sec><sec id="s4_2"><title>4.2. Hysteresis Modelling Steps</title><p>The hysteresis modelling of a PEA, as illustrated in <xref ref-type="fig" rid="fig1">Figure 1</xref>3, comprises three steps: model determination, parameter estimation, and output hysteresis loop. The aforementioned component can serve as the precursor for hysteresis compensation design, enabling the creation of a well-designed compensator that can be integrated with the control system to achieve linear PEA control.</p><sec id="s4_2_1"><title>4.2.1. Specify a Category of Models</title><p>The hysteresis models in the current literature include not only single and multiple models based on classical approaches [<xref ref-type="bibr" rid="scirp.126938-ref177">177</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref178">178</xref>] , but also those based on</p><p>the other models [<xref ref-type="bibr" rid="scirp.126938-ref179">179</xref>] [<xref ref-type="bibr" rid="scirp.126938-ref180">180</xref>] . There are also hybrid models that combine the classical models with the other models [<xref ref-type="bibr" rid="scirp.126938-ref181">181</xref>] .</p></sec><sec id="s4_2_2"><title>4.2.2. Model Parameter Estimation</title><p>The model parameters can be estimated using both nonparametric and parametric identification methods. Nonparametric identification refers to designing the recognizer to mimic the behaviour of the real system in order to minimize error, while parameter identification involves estimation through optimization tools [<xref ref-type="bibr" rid="scirp.126938-ref109">109</xref>] . The original input and output data of the PEA serve as known variables in solving for the parameters using the aforementioned method.</p></sec><sec id="s4_2_3"><title>4.2.3. Hysteresis Loop</title><p>The original input data is fed into the hysteresis model to obtain the output, which is then compared with the original data output to determine modelling accuracy. At this point, hysteresis modelling is completed. In addition to the improvement of hardware equipment accuracy, the following methods are commonly employed in hysteresis modelling to enhance its accuracy.</p><p>1) Design an enhanced classical model by refining the fundamental computational units within the classical models.</p><p>2) Develop improved algorithms for identifying unknown parameters in the classical models.</p><p>3) Explore hybridization of the classical models with the other model using varying weights.</p></sec></sec></sec><sec id="s5"><title>5. Conclusion</title><p>Piezoelectric materials have found extensive applications in various industries. However, the issues of hysteresis and nonlinear control in achieving high precision for piezoelectric materials require resolution. This paper introduces the characteristics of PEAs and summarizes the typical applications and hysteresis modelling models of PEAs. Then the hysteresis modelling steps of the PEAs are proposed. The critical points of PEAs hysteresis modelling are summarized, including the selection of a classical model, parameter identification algorithm and hysteresis compensation method. It is suggested that algorithm optimization and hybrid hysteresis model will be the preferred options for high-precision hysteresis modelling of PEAs in the future.</p></sec><sec id="s6"><title>Conflicts of Interest</title><p>The author declares no conflicts of interest.</p></sec><sec id="s7"><title>Cite this paper</title><p>Yang, Y.Z. (2023) Piezoelectric Actuators Application and Hysteresis Modelling: A Brief Survey. Open Access Library Journal, 10: e10482. https://doi.org/10.4236/oalib.1110482</p></sec></body><back><ref-list><title>References</title><ref id="scirp.126938-ref1"><label>1</label><mixed-citation publication-type="other" xlink:type="simple">Sezer, N. and Ko, M. (2021) A Comprehensive Review on the State-of-the-Art of Piezoelectric Energy Harvesting. Nano Energy, 80, Article ID: 105567.  
https://doi.org/10.1016/j.nanoen.2020.105567</mixed-citation></ref><ref id="scirp.126938-ref2"><label>2</label><mixed-citation publication-type="other" xlink:type="simple">Wu, Y., Ma, Y., Zheng, H. and Ramakrishna, S. (2021) Piezoelectric Materials for Flexible and Wearable Electronics: A Review. Materials &amp; Design, 211, Article ID: 110164. https://doi.org/10.1016/j.matdes.2021.110164</mixed-citation></ref><ref id="scirp.126938-ref3"><label>3</label><mixed-citation publication-type="other" xlink:type="simple">Ding, B., Zhao, J. and Li, Y. (2021) Design of A Spatial Constant-Force End-Effector for Polishing/Deburring Operations. The International Journal of Advanced Manufacturing Technology, 116, 3507-3515. https://doi.org/10.1007/s00170-021-07579-1</mixed-citation></ref><ref id="scirp.126938-ref4"><label>4</label><mixed-citation publication-type="other" xlink:type="simple">Jin, H., et al. (2022) Review on Piezoelectric Actuators Based on High Performance Piezoelectric Materials. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 69, 3057-3069. https://doi.org/10.1109/TUFFC.2022.3175853</mixed-citation></ref><ref id="scirp.126938-ref5"><label>5</label><mixed-citation publication-type="other" xlink:type="simple">Xing, J., Ning, C., Liu, Y. and Howard, I. (2022) Piezoelectric Inertial Robot for Operating in Small Pipelines Based on Stick-Slip Mechanism: Modeling and Experiment. Frontiers of Mechanical Engineering, 17, Article No. 41.  
https://doi.org/10.1007/s11465-022-0697-z</mixed-citation></ref><ref id="scirp.126938-ref6"><label>6</label><mixed-citation publication-type="other" xlink:type="simple">Curie, J. and Curie, P. (1880) Développement par compression de l’électricité polaire dans les cristaux hémièdres à faces inclinées. Bulletin de minéralogie, 3, 90-93. 
https://doi.org/10.3406/bulmi.1880.1564</mixed-citation></ref><ref id="scirp.126938-ref7"><label>7</label><mixed-citation publication-type="other" xlink:type="simple">Tian, X., Liu, Y., Deng, J., Wang, L. and Chen, W. (2020) A Review on Piezoelectric Ultrasonic Motors for the Past Decade: Classification, Operating Principle, Performance, and Future Work Perspectives. Sensors and Actuators A: Physical, 306, Article ID: 111971. https://doi.org/10.1016/j.sna.2020.111971</mixed-citation></ref><ref id="scirp.126938-ref8"><label>8</label><mixed-citation publication-type="other" xlink:type="simple">Safaei, M., Sodano, H.A. and Anton, S.R. (2019) A Review of Energy Harvesting Using Piezoelectric Materials: State-of-the-Art a Decade Later (2008-2018). Smart Materials and Structures, 28, Article ID: 113001.  
https://doi.org/10.1088/1361-665X/ab36e4</mixed-citation></ref><ref id="scirp.126938-ref9"><label>9</label><mixed-citation publication-type="other" xlink:type="simple">Aabid, A., et al. (2021) A Systematic Review of Piezoelectric Materials and Energy Harvesters for Industrial Applications. Sensors, 21, Article No. 4145.  
https://doi.org/10.3390/s21124145</mixed-citation></ref><ref id="scirp.126938-ref10"><label>10</label><mixed-citation publication-type="other" xlink:type="simple">Yang, Z., Zhou, S., Zu, J. and Inman, D. (2018) High-Performance Piezoelectric Energy Harvesters and Their Applications. Joule, 2, 642-697.  
https://doi.org/10.1016/j.joule.2018.03.011</mixed-citation></ref><ref id="scirp.126938-ref11"><label>11</label><mixed-citation publication-type="other" xlink:type="simple">Le, A.T., Ahmadipour, M. and Pung, S.-Y. (2020) A Review on ZnO-Based Piezoelectric Nanogenerators: Synthesis, Characterization Techniques, Performance Enhancement and Applications. Journal of Alloys and Compounds, 844, Article ID: 156172. https://doi.org/10.1016/j.jallcom.2020.156172</mixed-citation></ref><ref id="scirp.126938-ref12"><label>12</label><mixed-citation publication-type="other" xlink:type="simple">Soin, N., et al. (2016) High Performance Triboelectric Nanogenerators Based on Phase-Inversion Piezoelectric Membranes of Poly (Vinylidene Fluoride)-Zinc Stannate (PVDF-ZnSnO3) and Polyamide-6 (PA6). Nano Energy, 30, 470-480.  
https://doi.org/10.1016/j.nanoen.2016.10.040</mixed-citation></ref><ref id="scirp.126938-ref13"><label>13</label><mixed-citation publication-type="other" xlink:type="simple">Sarker, M.R., Julai, S., Sabri, M.F.M., Said, S.M., Islam, M.M. and Tahir, M. (2019) Review of Piezoelectric Energy Harvesting System and Application of Optimization Techniques to Enhance the Performance of the Harvesting System. Sensors and Actuators A: Physical, 300, Article ID: 111634.  
https://doi.org/10.1016/j.sna.2019.111634</mixed-citation></ref><ref id="scirp.126938-ref14"><label>14</label><mixed-citation publication-type="other" xlink:type="simple">Lu, C., et al. (2022) Wind Energy Harvester Using Piezoelectric Materials. Review of Scientific Instruments, 93, Article ID: 031502. https://doi.org/10.1063/5.0065462</mixed-citation></ref><ref id="scirp.126938-ref15"><label>15</label><mixed-citation publication-type="other" xlink:type="simple">Fakhri, P., et al. (2019) Flexible Hybrid Structure Piezoelectric Nanogenerator Based on ZnO nanorod/PVDF Nanofibers with Improved Output. RSC Advances, 9, 10117-10123. https://doi.org/10.1039/C8RA10315A</mixed-citation></ref><ref id="scirp.126938-ref16"><label>16</label><mixed-citation publication-type="other" xlink:type="simple">Deng, W., et al. (2019) Cowpea-Structured PVDF/ZnO Nanofibers Based Flexible Self-Powered Piezoelectric Bending Motion Sensor towards Remote Control of Gestures. Nano Energy, 55, 516-525. https://doi.org/10.1016/j.nanoen.2018.10.049</mixed-citation></ref><ref id="scirp.126938-ref17"><label>17</label><mixed-citation publication-type="other" xlink:type="simple">Singh, A., Monga, S., Sharma, N., Sreenivas, K. and Katiyar, R.S. (2022) Ferroelectric, Piezoelectric Mechanism and Applications. Journal of Asian Ceramic Societies, 10, 275-291. https://doi.org/10.1080/21870764.2022.2075618</mixed-citation></ref><ref id="scirp.126938-ref18"><label>18</label><mixed-citation publication-type="other" xlink:type="simple">Pop, F., Herrera, B. and Rinaldi, M. (2022) Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers for High Data-Rate Intrabody Communication. Nature Communications, 13, Article No. 1782.  
https://doi.org/10.1038/s41467-022-29355-9</mixed-citation></ref><ref id="scirp.126938-ref19"><label>19</label><mixed-citation publication-type="other" xlink:type="simple">Chen, W., Jia, W., Xiao, Y., Feng, Z. and Wu, G. (2021) A Temperature-Stable and Low Impedance Piezoelectric MEMS Resonator for Drop-In Replacement of Quartz Crystals. IEEE Electron Device Letters, 42, 1382-1385.  
https://doi.org/10.1109/LED.2021.3094319</mixed-citation></ref><ref id="scirp.126938-ref20"><label>20</label><mixed-citation publication-type="other" xlink:type="simple">Pulskamp, J.S., et al. (2012) Piezoelectric PZT MEMS Technologies for Small-Scale Robotics and RF Applications. MRS Bulletin, 37, 1062-1070.  
https://doi.org/10.1557/mrs.2012.269</mixed-citation></ref><ref id="scirp.126938-ref21"><label>21</label><mixed-citation publication-type="other" xlink:type="simple">Wang, P., et al. (2021) Ultrasmall Barium Titanate Nanoparticles for Highly Efficient Hypoxic Tumor Therapy via Ultrasound Triggered Piezocatalysis and Water Splitting. ACS Nano, 15, 11326-11340. https://doi.org/10.1021/acsnano.1c00616</mixed-citation></ref><ref id="scirp.126938-ref22"><label>22</label><mixed-citation publication-type="other" xlink:type="simple">Tian, J., Jiang, F., Zeng, Q., PourhosseiniAsl, M., Han, C. and Ren, K. (2023) Biocompatible Piezoelectric Polymer Poly (Lactic Acid)-Based Stethoscope for Wearable Health Monitoring Devices. IEEE Sensors Journal, 23, 6264-6271.  
https://doi.org/10.1109/JSEN.2023.3240120</mixed-citation></ref><ref id="scirp.126938-ref23"><label>23</label><mixed-citation publication-type="other" xlink:type="simple">Choi, N., et al. (2022) Fabrication and Simulation of a Piezoelectric PIN-PMN-PT Thin Film for Ultrahigh-Frequency Ultrasonic Transducers. Sensors and Actuators A: Physical, 347, Article ID: 113936. https://doi.org/10.1016/j.sna.2022.113936</mixed-citation></ref><ref id="scirp.126938-ref24"><label>24</label><mixed-citation publication-type="other" xlink:type="simple">Li, Z., et al. (2022) High-Frequency Self-Focusing Ultrasonic Transducer with Piezoelectric Metamaterial. IEEE Electron Device Letters, 43, 946-949.  
https://doi.org/10.1109/LED.2022.3170613</mixed-citation></ref><ref id="scirp.126938-ref25"><label>25</label><mixed-citation publication-type="other" xlink:type="simple">Guo, S., Duan, X., Xie, M., Aw, K.C. and Xue, Q. (2020) Composites, Fabrication and Application of Polyvinylidene Fluoride for Flexible Electromechanical Devices: A Review. Micromachines, 11, Article No. 1076.  
https://doi.org/10.3390/mi11121076</mixed-citation></ref><ref id="scirp.126938-ref26"><label>26</label><mixed-citation publication-type="other" xlink:type="simple">Yamashita, Y., Karaki, T., Lee, H.-Y., Wan, H., Kim, H.-P. and Jiang, X. (2022) A Review of Lead Perovskite Piezoelectric Single Crystals and Their Medical Transducers Application. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 69, 3048-3056. https://doi.org/10.1109/TUFFC.2022.3160526</mixed-citation></ref><ref id="scirp.126938-ref27"><label>27</label><mixed-citation publication-type="other" xlink:type="simple">Tian, F., Liu, Y., Ma, R., Li, F., Xu, Z. and Yang, Y. (2021) Properties of PMN-PT Single Crystal Piezoelectric Material and Its Application in Underwater Acoustic Transducer. Applied Acoustics, 175, Article ID: 107827.  
https://doi.org/10.1016/j.apacoust.2020.107827</mixed-citation></ref><ref id="scirp.126938-ref28"><label>28</label><mixed-citation publication-type="other" xlink:type="simple">Wang, X., Huan, Y., Ji, S., Zhu, Y., Wei, T. and Cheng, Z. (2022) Ultra-High Piezoelectric Performance by Rational Tuning of HeterovalentIon Doping in Lead-Free Piezoelectric Ceramics. Nano Energy, 101, Article ID: 107580.  
https://doi.org/10.1016/j.nanoen.2022.107580</mixed-citation></ref><ref id="scirp.126938-ref29"><label>29</label><mixed-citation publication-type="other" xlink:type="simple">Yin, J., Chen, S., Wong, V.-K. and Yao, K. (2022)Thermal Sprayed Lead-Free Piezoelectric Ceramic Coatings for Ultrasonic Structural Health Monitoring. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 69, 3070-3080.  
https://doi.org/10.1109/TUFFC.2022.3176488</mixed-citation></ref><ref id="scirp.126938-ref30"><label>30</label><mixed-citation publication-type="other" xlink:type="simple">Smith, M. and Kar-Narayan, S. (2022) Piezoelectric Polymers: Theory, Challenges and Opportunities. International Materials Reviews, 67, 65-88.  
https://doi.org/10.1080/09506608.2021.1915935</mixed-citation></ref><ref id="scirp.126938-ref31"><label>31</label><mixed-citation publication-type="other" xlink:type="simple">Habib, M., Lantgios, I. and Hornbostel, K. (2022) A Review of Ceramic, Polymer and Composite Piezoelectric Materials. Journal of Physics D: Applied Physics, 55, Article ID: 423002. https://doi.org/10.1088/1361-6463/ac8687</mixed-citation></ref><ref id="scirp.126938-ref32"><label>32</label><mixed-citation publication-type="other" xlink:type="simple">Dong, K., Peng, X. and Wang, Z.L. (2020) Fiber/Fabric-Based Piezoelectric and Triboelectric Nanogenerators for Flexible/Stretchable and Wearable Electronics and Artificial Intelligence. Advanced Materials, 32, Article ID: 1902549.  
https://doi.org/10.1002/adma.201902549</mixed-citation></ref><ref id="scirp.126938-ref33"><label>33</label><mixed-citation publication-type="other" xlink:type="simple">Liu, L., et al. (2020) Nanowrinkle-Patterned Flexible Woven Triboelectric Nanogenerator toward Self-Powered Wearable Electronics. Nano Energy, 73, Article ID: 104797. https://doi.org/10.1016/j.nanoen.2020.104797</mixed-citation></ref><ref id="scirp.126938-ref34"><label>34</label><mixed-citation publication-type="other" xlink:type="simple">Wang, J., et al. (2020) Enhancement of Low-Speed Piezoelectric Wind Energy Harvesting by Bluff Body Shapes: Spindle-Like and Butterfly-Like Cross-Sections. Aerospace Science and Technology, 103, Article ID: 105898.  
https://doi.org/10.1016/j.ast.2020.105898</mixed-citation></ref><ref id="scirp.126938-ref35"><label>35</label><mixed-citation publication-type="journal" xlink:type="simple"><name name-style="western"><surname>Edison</surname><given-names> T.A. </given-names></name>,<etal>et al</etal>. (<year>1888</year>)<article-title>The Perfected Phonograph</article-title><source> The North American Review</source><volume> 146</volume>,<fpage> 641</fpage>-<lpage>650</lpage>.<pub-id pub-id-type="doi"></pub-id></mixed-citation></ref><ref id="scirp.126938-ref36"><label>36</label><mixed-citation publication-type="other" xlink:type="simple">Rashid, A., Zubair, U., Ashraf, M., Javid, A., Abid, H.A. and Akram, S. (2023) Flexible Piezoelectric Coatings on Textiles for Energy Harvesting and Autonomous Sensing Applications: A Review. Journal of Coatings Technology and Research, 20, 141-172.  
https://doi.org/10.1007/s11998-022-00690-2</mixed-citation></ref><ref id="scirp.126938-ref37"><label>37</label><mixed-citation publication-type="other" xlink:type="simple">Palmer, S., et al. (2022) High Bandwidth Frequency Modulation of an External Cavity Diode Laser Using an Intracavity Lithium Niobate Electro-Optic Modulator as Output Coupler. APL Photonics, 7, Article ID: 086106.  
https://doi.org/10.1063/5.0097880</mixed-citation></ref><ref id="scirp.126938-ref38"><label>38</label><mixed-citation publication-type="other" xlink:type="simple">Xu, L., Liu, N., Zhou, S., Zhang, L. and Li, J. (2020) Dual-Spectroscopy Technique Based on Quartz Crystal Tuning Fork Detector. Sensors and Actuators A: Physical, 304, Article ID: 111873. https://doi.org/10.1016/j.sna.2020.111873</mixed-citation></ref><ref id="scirp.126938-ref39"><label>39</label><mixed-citation publication-type="other" xlink:type="simple">Choi, J., et al. (2017) Thin-Film Piezoelectric and High-Aspect Ratio Polymer Leg Mechanisms for Millimeter-Scale Robotics. International Journal of Intelligent Robotics and Applications, 1, 180-194. https://doi.org/10.1007/s41315-017-0017-7</mixed-citation></ref><ref id="scirp.126938-ref40"><label>40</label><mixed-citation publication-type="other" xlink:type="simple">Ling, J., Wang, K., Wang, Z., Huang, H. and Zhang, G. (2020) Enhanced Piezoelectric-Induced Catalysis of SrTiO3 Nanocrystal with Well-Defined Facets under Ultrasonic Vibration. Ultrasonics Sonochemistry, 61, Article ID: 104819.  
https://doi.org/10.1016/j.ultsonch.2019.104819</mixed-citation></ref><ref id="scirp.126938-ref41"><label>41</label><mixed-citation publication-type="other" xlink:type="simple">Chen, D., et al. (2021) Recent Development and Perspectives of Optimization Design Methods for Piezoelectric Ultrasonic Transducers. Micromachines, 12, Article No. 779. https://doi.org/10.3390/mi12070779</mixed-citation></ref><ref id="scirp.126938-ref42"><label>42</label><mixed-citation publication-type="other" xlink:type="simple">Wan, L.F., Nishimatsu, T. and Beckman, S. (2012) The Structural, Dielectric, Elastic, and Piezoelectric Properties of KNbO3 from First-Principles Methods. Journal of Applied Physics, 111, Article ID: 104107. https://doi.org/10.1063/1.4712052</mixed-citation></ref><ref id="scirp.126938-ref43"><label>43</label><mixed-citation publication-type="other" xlink:type="simple">Dong, L., et al. (2020) Cardiac Energy Harvesting and Sensing Based on Piezoelectric and Triboelectric Designs. Nano Energy, 76, Article ID: 105076.  
https://doi.org/10.1016/j.nanoen.2020.105076</mixed-citation></ref><ref id="scirp.126938-ref44"><label>44</label><mixed-citation publication-type="other" xlink:type="simple">Sakamiya, M., Fang, Y., Mo, X., Shen, J. and Zhang, T. (2020) A Heart-on-a-Chip Platform for Online Monitoring of Contractile Behavior via Digital Image Processing and Piezoelectric Sensing Technique. Medical Engineering &amp; Physics, 75, 36-44.  
https://doi.org/10.1016/j.medengphy.2019.10.001</mixed-citation></ref><ref id="scirp.126938-ref45"><label>45</label><mixed-citation publication-type="other" xlink:type="simple">Park, S., et al. (2018) PVDF-Based Piezoelectric Microphone for Sound Detection Inside the Cochlea: Toward Totally Implantable Cochlear Implants. Trends in Hearing, 22, Article ID: 2331216518774450.  
https://doi.org/10.1177/2331216518774450</mixed-citation></ref><ref id="scirp.126938-ref46"><label>46</label><mixed-citation publication-type="other" xlink:type="simple">Guo, Z., et al. (2020) Self-Powered Sound Detection and Recognition Sensors Based on Flexible Polyvinylidene Fluoride-Trifluoroethylene Films Enhanced by in-Situ Po-larization. Sensors and Actuators A: Physical, 306, Article ID: 111970.  
https://doi.org/10.1016/j.sna.2020.111970</mixed-citation></ref><ref id="scirp.126938-ref47"><label>47</label><mixed-citation publication-type="other" xlink:type="simple">Yang, Z., Chen, C., Chen, W., Chen, H. and Liu, Z. (2022) Improved Sliding Mode Dynamic Matrix Control Strategy: Application on Spindle Loading and Precision Measuring Device Based on Piezoelectric Actuator. Mechanical Systems and Signal Processing, 167, Article ID: 108543. https://doi.org/10.1016/j.ymssp.2021.108543</mixed-citation></ref><ref id="scirp.126938-ref48"><label>48</label><mixed-citation publication-type="other" xlink:type="simple">Al Janaideh, M. and Rakotondrabe, M. (2021) Precision Motion Control of a Piezoelectric Cantilever Positioning System with Rate-Dependent Hysteresis Nonlinearities. Nonlinear Dynamics, 104, 3385-3405.  
https://doi.org/10.1007/s11071-021-06460-w</mixed-citation></ref><ref id="scirp.126938-ref49"><label>49</label><mixed-citation publication-type="other" xlink:type="simple">Zhang, S.-Q., Zhao, G.-Z., Rao, M.N., Schmidt, R. and Yu, Y.-J. (2019) A Review on Modeling Techniques of Piezoelectric Integrated Plates and Shells. Journal of Intelligent Material Systems and Structures, 30, 1133-1147.  
https://doi.org/10.1177/1045389X19836169</mixed-citation></ref><ref id="scirp.126938-ref50"><label>50</label><mixed-citation publication-type="other" xlink:type="simple">Du, S., Jia, Y., Zhao, C., Amaratunga, G.A. and Seshia, A.A. (2019) A Nail-Size Piezoelectric Energy Harvesting System Integrating a MEMS Transducer and a CMOS SSHI Circuit. IEEE Sensors Journal, 20, 277-285.  
https://doi.org/10.1109/JSEN.2019.2941180</mixed-citation></ref><ref id="scirp.126938-ref51"><label>51</label><mixed-citation publication-type="other" xlink:type="simple">Ding, Y., Cai, Y. and Li, Y. (2022) Continuously Adjustable Micro Valve Based on a Piezoelectric Actuator for High-Precision Flow Rate Control. Electronics, 11, Article No. 1689. https://doi.org/10.3390/electronics11111689</mixed-citation></ref><ref id="scirp.126938-ref52"><label>52</label><mixed-citation publication-type="other" xlink:type="simple">Mohith, S., Upadhya, A.R., Navin, K.P., Kulkarni, S. and Rao, M. (2020) Recent Trends in Piezoelectric Actuators for Precision Motion and Their Applications: A Review. Smart Materials and Structures, 30, Article ID: 013002.  
https://doi.org/10.1088/1361-665X/abc6b9</mixed-citation></ref><ref id="scirp.126938-ref53"><label>53</label><mixed-citation publication-type="other" xlink:type="simple">Kim, B., Washington, G.N. and Yoon, H.-S. (2014) Control and Hysteresis Reduction in Prestressed Curved Unimorph Actuators Using Model Predictive Control. Journal of Intelligent Material Systems and Structures, 25, 290-307.  
https://doi.org/10.1177/1045389X13493353</mixed-citation></ref><ref id="scirp.126938-ref54"><label>54</label><mixed-citation publication-type="other" xlink:type="simple">Haller, D., et al. (2011) Piezo-Polymer-Composite Unimorph Actuators for Active Cancellation of Flow Instabilities across Airfoils. Journal of Intelligent Material Systems and Structures, 22, 461-474. https://doi.org/10.1177/1045389X10395794</mixed-citation></ref><ref id="scirp.126938-ref55"><label>55</label><mixed-citation publication-type="other" xlink:type="simple">Ovezea, D., et al. (2022) Exeprimental Testing of a Tremor Compensation System with Bimorph Piezoceramic Actuators Using Optical Methods. International Journal of Mechatronics and Applied Mechanics, No. 11, 31-41.</mixed-citation></ref><ref id="scirp.126938-ref56"><label>56</label><mixed-citation publication-type="other" xlink:type="simple">van den Ende, D., Bos, B. and Groen, W. (2009) Non-Linear Electromechanical Behaviour of Piezoelectric Bimorph Actuators: Influence on Performance and Lifetime. Journal of Electroceramics, 22, 185-191.  
https://doi.org/10.1007/s10832-008-9459-5</mixed-citation></ref><ref id="scirp.126938-ref57"><label>57</label><mixed-citation publication-type="other" xlink:type="simple">Habineza, D., Rakotondrabe, M. and Gorrec, Y.L. (2016) Characterization, Modeling and H∞ Control of n-DOF Piezoelectric Actuators: Application to a 3-DOF Precise Positioner. Asian Journal of Control, 18, 1239-1258.  
https://doi.org/10.1002/asjc.1224</mixed-citation></ref><ref id="scirp.126938-ref58"><label>58</label><mixed-citation publication-type="other" xlink:type="simple">Kuiper, S. and Schitter, G. (2010) Active Damping of a Piezoelectric Tube Scanner Using Self-Sensing Piezo Actuation. Mechatronics, 20, 656-665.  
https://doi.org/10.1016/j.mechatronics.2010.07.003</mixed-citation></ref><ref id="scirp.126938-ref59"><label>59</label><mixed-citation publication-type="other" xlink:type="simple">Li, W., Yang, Z., Li, K. and Wang, W. (2021) Hybrid Feedback PID-FxLMS Algorithm for Active Vibration Control of Cantilever Beam with Piezoelectric Stack Actuator. Journal of Sound and Vibration, 509, Article ID: 116243.  
https://doi.org/10.1016/j.jsv.2021.116243</mixed-citation></ref><ref id="scirp.126938-ref60"><label>60</label><mixed-citation publication-type="other" xlink:type="simple">Wang, S., Rong, W., Wang, L., Xie, H., Sun, L. and Mills, J.K. (2019) A Survey of Piezoelectric Actuators with Long Working Stroke in Recent Years: Classifications, Principles, Connections and Distinctions. Mechanical Systems and Signal Processing, 123, 591-605. https://doi.org/10.1016/j.ymssp.2019.01.033</mixed-citation></ref><ref id="scirp.126938-ref61"><label>61</label><mixed-citation publication-type="other" xlink:type="simple">Koyuncu, A. (2022) Design, Modelling and Analysis of a Novel Implantable bone Conduction Hearing Aid with a Piezoelectric Actuator. Middle East Technical University, Ankara.</mixed-citation></ref><ref id="scirp.126938-ref62"><label>62</label><mixed-citation publication-type="other" xlink:type="simple">Ding, B., Li, X. and Li, Y. (2022) Configuration Design and Experimental Verification of a Variable Constant-Force Compliant Mechanism. Robotica, 40, 3463-3475.  
https://doi.org/10.1017/S0263574722000340</mixed-citation></ref><ref id="scirp.126938-ref63"><label>63</label><mixed-citation publication-type="other" xlink:type="simple">Sun, W., et al. (2022) An Impact Inertial Piezoelectric Actuator Designed by Means of the Asymmetric Friction. IEEE Transactions on Industrial Electronics, 70, 699-708.  
https://doi.org/10.1109/TIE.2022.3153807</mixed-citation></ref><ref id="scirp.126938-ref64"><label>64</label><mixed-citation publication-type="other" xlink:type="simple">Ding, B., Yang, Z.-X., Zhang, G. and Xiao, X. (2017) Optimum Design and Analysis of Flexure Based Mechanism for Non-Circular Diamond Turning Operation. Advances in Mechanical Engineering, 9, Article ID: 1687814017743353.  
https://doi.org/10.1177/1687814017743353</mixed-citation></ref><ref id="scirp.126938-ref65"><label>65</label><mixed-citation publication-type="other" xlink:type="simple">Liu, Y., Deng, J. and Su, Q. (2018) Review on Multi-Degree-of-Freedom Piezoelectric Motion Stage. IEEE Access, 6, 59986-60004.  
https://doi.org/10.1109/ACCESS.2018.2875940</mixed-citation></ref><ref id="scirp.126938-ref66"><label>66</label><mixed-citation publication-type="other" xlink:type="simple">Sun, X., Chen, W., Zhang, J., Zhou, R. and Chen, W. (2015) A Novel Piezo-Driven Linear-Rotary Inchworm Actuator. Sensors and Actuators A: Physical, 224, 78-86.  
https://doi.org/10.1016/j.sna.2015.01.024</mixed-citation></ref><ref id="scirp.126938-ref67"><label>67</label><mixed-citation publication-type="other" xlink:type="simple">Ding, B., Li, Y., Xiao, X., Tang, Y. and Li, B. (2017) Design and Analysis of a 3-DOF Planar Micromanipulation Stage with Large Rotational Displacement for Micromanipulation System. Mechanical Sciences, 18, 117-126.  
https://doi.org/10.5194/ms-8-117-2017</mixed-citation></ref><ref id="scirp.126938-ref68"><label>68</label><mixed-citation publication-type="other" xlink:type="simple">Wang, L., Chen, W., Liu, J., Deng, J. and Liu, Y. (2019) A Review of Recent Studies on Non-Resonant Piezoelectric Actuators. Mechanical Systems and Signal Processing, 133, Article ID: 106254. https://doi.org/10.1016/j.ymssp.2019.106254</mixed-citation></ref><ref id="scirp.126938-ref69"><label>69</label><mixed-citation publication-type="other" xlink:type="simple">Ding, B., Li, X. and Li, Y. (2021) FEA-Based Optimization and Experimental Verification of a Typical Flexure-Based Constant Force Module. Sensors and Actuators A: Physical, 332, Article ID: 113083. https://doi.org/10.1016/j.sna.2021.113083</mixed-citation></ref><ref id="scirp.126938-ref70"><label>70</label><mixed-citation publication-type="other" xlink:type="simple">Li, J., Huang, H. and Morita, T. (2019) Stepping Piezoelectric Actuators with Large Working Stroke for Nano-Positioning Systems: A Review. Sensors and Actuators A: Physical, 292, 39-51. https://doi.org/10.1016/j.sna.2019.04.006</mixed-citation></ref><ref id="scirp.126938-ref71"><label>71</label><mixed-citation publication-type="other" xlink:type="simple">Yang, C., Wang, Y. and Fan, W. (2022) Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station. Micromachines, 13, Article No. 412.  
https://doi.org/10.3390/mi13030412</mixed-citation></ref><ref id="scirp.126938-ref72"><label>72</label><mixed-citation publication-type="other" xlink:type="simple">Qi, H.Y. (2019) Influence of Waveform Symmetry on Output Performance of Piezoelectric Inertia Actuator Controlled by Composite Method. IOP Conference Series: Materials Science and Engineering, 565, Article ID: 012014.  
https://doi.org/10.1088/1757-899X/565/1/012014</mixed-citation></ref><ref id="scirp.126938-ref73"><label>73</label><mixed-citation publication-type="other" xlink:type="simple">Shao, Y., Xu, M., Shao, S. and Song, S. (2020) Effective Dynamical Model for Piezoelectric Stick-Slip Actuators in Bi-Directional Motion. Mechanical Systems and Signal Processing, 145, Article ID: 106964.  
https://doi.org/10.1016/j.ymssp.2020.106964</mixed-citation></ref><ref id="scirp.126938-ref74"><label>74</label><mixed-citation publication-type="other" xlink:type="simple">Wang, X., Zhu, L. and Huang, H. (2020) A Dynamic Model of Stick-Slip Piezoelectric Actuators Considering the Deformation of Overall System. IEEE Transactions on Industrial Electronics, 68, 11266-11275.  
https://doi.org/10.1109/TIE.2020.3032922</mixed-citation></ref><ref id="scirp.126938-ref75"><label>75</label><mixed-citation publication-type="other" xlink:type="simple">Bai, D., Li, Y., Quan, Q., Tang, D. and Deng, Z. (2023) Development of a Rotary-Percussive Ultrasonic Drill Using a Bolt-Clamped Type Piezoelectric Actuator. Advances in Space Research, 71, 5360-5368.  
https://doi.org/10.1016/j.asr.2023.02.008</mixed-citation></ref><ref id="scirp.126938-ref76"><label>76</label><mixed-citation publication-type="other" xlink:type="simple">Suryawanshi, P. and Arunkumar, G. (2022) A Review on Design and Development of Multi Degree of Freedom Compliant Mechanism. AIP Conference Proceedings, 2460, Article ID: 080005. https://doi.org/10.1063/5.0095660</mixed-citation></ref><ref id="scirp.126938-ref77"><label>77</label><mixed-citation publication-type="other" xlink:type="simple">Wei, F., Wang, X., Dong, J., Guo, K. and Sui, Y. (2023) Development of a Three-Degree-of-Freedom Piezoelectric Actuator. Review of Scientific Instruments, 94, Article ID: 025001. https://doi.org/10.1063/5.0114030</mixed-citation></ref><ref id="scirp.126938-ref78"><label>78</label><mixed-citation publication-type="other" xlink:type="simple">Ceponis, A., Jūrenas, V. and Mazeika, D. (2022) Development of 5-DOF Piezoelectric Actuator for Planar—Angular Positioning. Applied Sciences, 12, Article No. 1033. https://doi.org/10.3390/app12031033</mixed-citation></ref><ref id="scirp.126938-ref79"><label>79</label><mixed-citation publication-type="other" xlink:type="simple">Gao, X., et al. (2020) Piezoelectric Actuators and Motors: Materials, Designs, and Applications. Advanced Materials Technologies, 5, Article ID: 1900716.  
https://doi.org/10.1002/admt.201900716</mixed-citation></ref><ref id="scirp.126938-ref80"><label>80</label><mixed-citation publication-type="other" xlink:type="simple">Wang, G., Yao, X., Cui, J., Yan, Y., Dai, J. and Zhao, W. (2020) A Novel Piezoelectric Hysteresis Modeling Method Combining LSTM and NARX Neural Networks. Modern Physics Letters B, 34, Article ID: 2050306.  
https://doi.org/10.1142/S0217984920503066</mixed-citation></ref><ref id="scirp.126938-ref81"><label>81</label><mixed-citation publication-type="other" xlink:type="simple">Gan, J. and Zhang, X. (2019) A Review of Nonlinear Hysteresis Modeling and Control of Piezoelectric Actuators. AIP Advances, 9, Article ID: 040702.  
https://doi.org/10.1063/1.5093000</mixed-citation></ref><ref id="scirp.126938-ref82"><label>82</label><mixed-citation publication-type="other" xlink:type="simple">Mayergoyz, I.D. (2003) Mathematical Models of Hysteresis and Their Applications. Academic Press, Cambridge, Massachusetts.</mixed-citation></ref><ref id="scirp.126938-ref83"><label>83</label><mixed-citation publication-type="other" xlink:type="simple">Smith, R.C. (2005) Smart Material Systems: Model Development. In: Frontiers in Applied Mathematics, Society for Industrial and Applied Mathematics, Philadelphia. https://doi.org/10.1137/1.9780898717471</mixed-citation></ref><ref id="scirp.126938-ref84"><label>84</label><mixed-citation publication-type="other" xlink:type="simple">Ding, B.X. and Li, Y.M. (2018) Hysteresis Compensation and Sliding Mode Control with Perturbation Estimation for Piezoelectric Actuators. Micromachines, 9, Article No. 241. https://doi.org/10.3390/mi9050241</mixed-citation></ref><ref id="scirp.126938-ref85"><label>85</label><mixed-citation publication-type="other" xlink:type="simple">Nie, L., Luo, Y., Gao, W. and Zhou, M. (2022) Rate-Dependent Asymmetric Hysteresis Modeling and Robust Adaptive Trajectory Tracking for Piezoelectric Micropositioning Stages. Nonlinear Dynamics, 108, 2023-2043.  
https://doi.org/10.1007/s11071-022-07324-7</mixed-citation></ref><ref id="scirp.126938-ref86"><label>86</label><mixed-citation publication-type="other" xlink:type="simple">Xu, M., Zhang, J.-Q., Rong, C. and Ni, J. (2020) Multislope PI Modeling and Feedforward Compensation for Piezoelectric Beam. Mathematical Problems in Engineering, 2020, Article ID: 6404971. https://doi.org/10.1155/2020/6404971</mixed-citation></ref><ref id="scirp.126938-ref87"><label>87</label><mixed-citation publication-type="other" xlink:type="simple">Preisach, F. (1935) über die magnetische Nachwirkung. Zeitschrift für Physik, 94, 277-302. https://doi.org/10.1007/BF01349418</mixed-citation></ref><ref id="scirp.126938-ref88"><label>88</label><mixed-citation publication-type="other" xlink:type="simple">Krasnosel’skii, M.A., and Pokrovskii, A.V. (2012) Systems with Hysteresis. Springer Science &amp; Business Media, Berlin.</mixed-citation></ref><ref id="scirp.126938-ref89"><label>89</label><mixed-citation publication-type="other" xlink:type="simple">Mayergoyz, I. (1986) Mathematical Models of Hysteresis. IEEE Transactions on Magnetics, 22, 603-608. https://doi.org/10.1109/TMAG.1986.1064347</mixed-citation></ref><ref id="scirp.126938-ref90"><label>90</label><mixed-citation publication-type="other" xlink:type="simple">Wawrzala, P. (2013) Application of a Preisach Hysteresis Model to the Evaluation of PMN-PT Ceramics Properties. Archives of Metallurgy and Materials, 58, 1347-1350.  
https://doi.org/10.2478/amm-2013-0172</mixed-citation></ref><ref id="scirp.126938-ref91"><label>91</label><mixed-citation publication-type="other" xlink:type="simple">Yang, L., Ding, B.X., Liao, W.H. and Li, Y.M. (2022) Identification of Preisach Model Parameters Based on an Improved Particle Swarm Optimization Method for Piezoelectric Actuators in Micro-Manufacturing Stages. Micromachines, 13, Article No. 698. https://doi.org/10.3390/mi13050698</mixed-citation></ref><ref id="scirp.126938-ref92"><label>92</label><mixed-citation publication-type="other" xlink:type="simple">Mayergoyz, I.D. and Friedman, G. (1988) Generalized Preisach Model of Hysteresis. IEEE Transactions on Magnetics, 24, 212-217. https://doi.org/10.1109/20.43892</mixed-citation></ref><ref id="scirp.126938-ref93"><label>93</label><mixed-citation publication-type="other" xlink:type="simple">Liu, V.-T. and Wing, H.-Y. (2022) Classical Preisach Model Based on Polynomial Approximation and Applied to Micro-Piezoelectric Actuators. Symmetry, 14, Article No. 1008. https://doi.org/10.3390/sym14051008</mixed-citation></ref><ref id="scirp.126938-ref94"><label>94</label><mixed-citation publication-type="other" xlink:type="simple">Szabó, Z. (2006) Preisach Functions Leading to Closed Form Permeability. Physica B: Condensed Matter, 372, 61-67. https://doi.org/10.1016/j.physb.2005.10.020</mixed-citation></ref><ref id="scirp.126938-ref95"><label>95</label><mixed-citation publication-type="other" xlink:type="simple">Mayergoyz, I.D. (1991) The Classical Preisach Model of Hysteresis. In: Mathematical Models of Hysteresis, Springer, New York, 1-63.  
https://doi.org/10.1007/978-1-4612-3028-1_1</mixed-citation></ref><ref id="scirp.126938-ref96"><label>96</label><mixed-citation publication-type="other" xlink:type="simple">Banks, H.T., Kurdila, A.J. and Webb, G. (1997) Identification of Hysteretic Control Influence Operators Representing Smart Actuators Part I: Formulation. Mathematical Problems in Engineering, 3, 287-328.  
https://doi.org/10.1155/S1024123X97000586</mixed-citation></ref><ref id="scirp.126938-ref97"><label>97</label><mixed-citation publication-type="other" xlink:type="simple">Vojta, G. (2010) M. A. Krasnosel'skil, A. V. Pokrovskii. Systems with Hysteresis. Springer-Verlag, Berlin, Heidelberg, New York, London, Paris, Tokyo 1989, XVIII u. 410 S., 81 figures, DM 148.–, ISBN 3-540-15543-0. Crystal Research and Technology, 24, K142. https://doi.org/10.1002/crat.2170240828</mixed-citation></ref><ref id="scirp.126938-ref98"><label>98</label><mixed-citation publication-type="other" xlink:type="simple">Xu, R., Tian, D. and Wang, Z. (2020) Adaptive Tracking Control for the Piezoelectric Actuated Stage Using the Krasnosel’skii-Pokrovskii Operator. Micromachines, 11, Article No. 537. https://doi.org/10.3390/mi11050537</mixed-citation></ref><ref id="scirp.126938-ref99"><label>99</label><mixed-citation publication-type="other" xlink:type="simple">Li, Z., Shan, J. and Gabbert, U. (2018) Inverse Compensation of Hysteresis Using Krasnoselskii-Pokrovskii Model. IEEE/ASME Transactions on Mechatronics, 23, 966-971. https://doi.org/10.1109/TMECH.2018.2805761</mixed-citation></ref><ref id="scirp.126938-ref100"><label>100</label><mixed-citation publication-type="other" xlink:type="simple">Galinaitis, W.S. (1999) Two Methods for Modeling Scalar Hysteresis and Their Use in Controlling Actuators with Hysteresis. Doctoral Dissertation, Virginia Tech, Blacksburg.</mixed-citation></ref><ref id="scirp.126938-ref101"><label>101</label><mixed-citation publication-type="other" xlink:type="simple">Amato, M., Ghezzi, L., Piegari, L. and Toscani, S. (2022) Definition and Identification of an Improved Preisach Model for Magnetic Hysteresis Based on the KP Operator. 2022 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), Ottawa, 16-19 May 2022, 1-6.  
https://doi.org/10.1109/I2MTC48687.2022.9806703</mixed-citation></ref><ref id="scirp.126938-ref102"><label>102</label><mixed-citation publication-type="other" xlink:type="simple">Egusa, S., et al. (2010) Multimaterial Piezoelectric Fibres. Nature Materials, 9, 643-648. https://doi.org/10.1038/nmat2792</mixed-citation></ref><ref id="scirp.126938-ref103"><label>103</label><mixed-citation publication-type="other" xlink:type="simple">Qin, Y., Xu, Y., Shen, C. and Han, J. (2022) High-Precision Displacement and Force Hybrid Modeling of Pneumatic Artificial Muscle Using 3D PI-NARMAX Model. Actuators, 11, Article No. 51. https://doi.org/10.3390/act11020051</mixed-citation></ref><ref id="scirp.126938-ref104"><label>104</label><mixed-citation publication-type="other" xlink:type="simple">Macki, J.W., Nistri, P. and Zecca, P. (1993) Mathematical Models for Hysteresis. SIAM Review, 35, 94-123. https://doi.org/10.1137/1035005</mixed-citation></ref><ref id="scirp.126938-ref105"><label>105</label><mixed-citation publication-type="other" xlink:type="simple">Kuhnen, K. and Janocha, H. (2001) Inverse Feedforward Controller for Complex Hysteretic Nonlinearities in Smart-Material Systems. Control and Intelligent Systems, 29, 74-83.</mixed-citation></ref><ref id="scirp.126938-ref106"><label>106</label><mixed-citation publication-type="other" xlink:type="simple">Krikelis, K., van Berkel, K. and Schoukens, M. (2021) Artificial Neural Network Hysteresis Operators for the Identification of Hammerstein Hysteretic Systems. IFAC-PapersOnLine, 54, 702-707. https://doi.org/10.1016/j.ifacol.2021.08.443</mixed-citation></ref><ref id="scirp.126938-ref107"><label>107</label><mixed-citation publication-type="other" xlink:type="simple">Al-Bender, F., Symens, W., Swevers, J. and Van Brussel, H. (2004) Theoretical Analysis of the Dynamic Behavior of Hysteresis Elements in Mechanical Systems. International Journal of Non-Linear Mechanics, 39, 1721-1735.  
https://doi.org/10.1016/j.ijnonlinmec.2004.04.005</mixed-citation></ref><ref id="scirp.126938-ref108"><label>108</label><mixed-citation publication-type="other" xlink:type="simple">Li, S., Yang, X., Li, Y. and Liu, N. (2019) Research on Modelling of Piezoelectric Micro-Positioning Stage Based on PI Hysteresis Model. The Journal of Engineering, 2019, 437-441. https://doi.org/10.1049/joe.2018.8978</mixed-citation></ref><ref id="scirp.126938-ref109"><label>109</label><mixed-citation publication-type="other" xlink:type="simple">Hassani, V., Tjahjowidodo, T. and Do, T.N. (2014) A Survey on Hysteresis Modeling, Identification and Control. Mechanical Systems and Signal Processing, 49, 209-233. https://doi.org/10.1016/j.ymssp.2014.04.012</mixed-citation></ref><ref id="scirp.126938-ref110"><label>110</label><mixed-citation publication-type="other" xlink:type="simple">Lining, S., Changhai, R., Weibin, R., Liguo, C. and Minxiu, K. (2004) Tracking Control of Piezoelectric Actuator Based on a New Mathematical Model. Journal of Micromechanics and Microengineering, 14, Article No. 1439.  
https://doi.org/10.1088/0960-1317/14/11/001</mixed-citation></ref><ref id="scirp.126938-ref111"><label>111</label><mixed-citation publication-type="book" xlink:type="simple">Gan, J. and Zhang, X. (2014) A Novel Mathematical Piezoelectric Hysteresis Model Based on Polynomial. In: Zhang, X., Liu, H., Chen, Z. and Wang, N., Eds., Intelligent Robotics and Applications. ICIRA 2014. Lecture Notes in Computer Science, Vol. 8918, Springer, Cham, 354-365. https://doi.org/10.1007/978-3-319-13963-0_36</mixed-citation></ref><ref id="scirp.126938-ref112"><label>112</label><mixed-citation publication-type="other" xlink:type="simple">Bashash, S. and Jalili, N. (2008) A Polynomial-Based Linear Mapping Strategy for Feedforward Compensation of Hysteresis in Piezoelectric Actuators. Journal of Dynamic Systems, Measurement, and Control, 130, Article ID: 031008.  
https://doi.org/10.1115/1.2907372</mixed-citation></ref><ref id="scirp.126938-ref113"><label>113</label><mixed-citation publication-type="other" xlink:type="simple">Yang, C., Verbeek, N., Xia, F., Wang, Y. and Youcef-Toumi, K. (2020) Modeling and Control of Piezoelectric Hysteresis: A Polynomial-Based Fractional Order Disturbance Compensation Approach. IEEE Transactions on Industrial Electronics, 68, 3348-3358. https://doi.org/10.1109/TIE.2020.2977567</mixed-citation></ref><ref id="scirp.126938-ref114"><label>114</label><mixed-citation publication-type="other" xlink:type="simple">Ikhouane, F., Ma&amp;ntilde;osa, V. and Rodellar, J. (2005) Adaptive Control of a Hysteretic Structural System. Automatica, 41, 225-231.  
https://doi.org/10.1016/j.automatica.2004.08.018</mixed-citation></ref><ref id="scirp.126938-ref115"><label>115</label><mixed-citation publication-type="other" xlink:type="simple">Bouc, R. (1967) Forced Vibrations of Mechanical Systems with Hysteresis. Proceedings of the 4th Conference on Nonlinear Oscillations, Prague, 5-9 September 1967.</mixed-citation></ref><ref id="scirp.126938-ref116"><label>116</label><mixed-citation publication-type="other" xlink:type="simple">Wen, Y.-K. (1976) Method for Random Vibration of Hysteretic Systems. Journal of the Engineering Mechanics Division, 102, 249-263.  
https://doi.org/10.1061/JMCEA3.0002106</mixed-citation></ref><ref id="scirp.126938-ref117"><label>117</label><mixed-citation publication-type="other" xlink:type="simple">Coleman, B.D. and Hodgdon, M.L. (1987) On a Class of Constitutive Relations for Ferromagnetic Hysteresis. Archive for Rational Mechanics and Analysis, 99, 375-396.  
https://doi.org/10.1007/BF00282052</mixed-citation></ref><ref id="scirp.126938-ref118"><label>118</label><mixed-citation publication-type="other" xlink:type="simple">Banning, R., de Koning, W.L., Adriaens, H.J. and Koops, R.K. (2001) State-Space Analysis and Identification for a Class of Hysteretic Systems. Automatica, 37, 1883-1892. https://doi.org/10.1016/S0005-1098(01)00157-1</mixed-citation></ref><ref id="scirp.126938-ref119"><label>119</label><mixed-citation publication-type="other" xlink:type="simple">Su, C.-Y., Stepanenko, Y., Svoboda, J. and Leung, T.P. (2000) Robust Adaptive Control of a Class of Nonlinear Systems with Unknown Backlash-Like Hysteresis. IEEE Transactions on Automatic Control, 45, 2427-2432.</mixed-citation></ref><ref id="scirp.126938-ref120"><label>120</label><mixed-citation publication-type="journal" xlink:type="simple"><name name-style="western"><surname>Dahl</surname><given-names> P.R. </given-names></name>,<etal>et al</etal>. (<year>1968</year>)<article-title>A Solid Friction Model</article-title><source> The Aerospace Corporation</source><volume> 18</volume>,<fpage> 1</fpage>-<lpage>24</lpage>.<pub-id pub-id-type="doi"></pub-id></mixed-citation></ref><ref id="scirp.126938-ref121"><label>121</label><mixed-citation publication-type="other" xlink:type="simple">Zhang, B., Yuan, X., Zeng, Y., Lang, L., Liang, H. and Zhang, Y. (2022) Dahl Friction Model for Driving Characteristics of V-Shape Linear Ultrasonic Motors. Micromachines, 13, Article No. 1407. https://doi.org/10.3390/mi13091407</mixed-citation></ref><ref id="scirp.126938-ref122"><label>122</label><mixed-citation publication-type="other" xlink:type="simple">Xu, Q. and Li, Y. (2010) Dahl Model-Based Hysteresis Compensation and Precise Positioning Control of an XY Parallel Micromanipulator with Piezoelectric Actuation. Journal of Dynamic Systems, Measurement, and Control, 132, Article ID: 041011. https://doi.org/10.1115/1.4001712</mixed-citation></ref><ref id="scirp.126938-ref123"><label>123</label><mixed-citation publication-type="other" xlink:type="simple">Ahmad, I., Ali, M.A. and Ko, W. (2020) Robust μ-Synthesis with Dahl Model Based Feedforward Compensator Design for Piezo-Actuated Micropositioning Stage. IEEE Access, 8, 141799-141813. https://doi.org/10.1109/ACCESS.2020.3013570</mixed-citation></ref><ref id="scirp.126938-ref124"><label>124</label><mixed-citation publication-type="other" xlink:type="simple">Jiles, D.C. and Atherton, D.L. (1986) Theory of Ferromagnetic Hysteresis. Journal of Magnetism and Magnetic Materials, 61, 48-60.  
https://doi.org/10.1016/0304-8853(86)90066-1</mixed-citation></ref><ref id="scirp.126938-ref125"><label>125</label><mixed-citation publication-type="other" xlink:type="simple">Smith, R.C. and Ounaies, Z. (2000) A Domain Wall Model for Hysteresis in Piezoelectric Materials. Journal of Intelligent Material Systems and Structures, 11, 62-79.  
https://doi.org/10.1106/HPHJ-UJ4D-E9D0-2MDY</mixed-citation></ref><ref id="scirp.126938-ref126"><label>126</label><mixed-citation publication-type="other" xlink:type="simple">Rossi, C., Colorado, J., Coral, W. and Barrientos, A. (2011) Bending Continuous Structures with SMAs: A Novel Robotic Fish Design. Bioinspiration &amp; Biomimetics, 6, Article ID: 045005. https://doi.org/10.1088/1748-3182/6/4/045005</mixed-citation></ref><ref id="scirp.126938-ref127"><label>127</label><mixed-citation publication-type="other" xlink:type="simple">Ikuta, K., Tsukamoto, M. and Hirose, S. (1991) Mathematical Model and Experimental Verification of Shape Memory Alloy for Designing Micro Actuator. Proceedings of the 1991 IEEE Micro Electro Mechanical Systems, Nara, 30 January-2 February 1991, 103-108.</mixed-citation></ref><ref id="scirp.126938-ref128"><label>128</label><mixed-citation publication-type="book" xlink:type="simple">Vasanth, P., Kamalakannan, G.M. and Shivaraj, C.S. (2019) Study of Different Modelling Techniques of SMA Actuator and Their Validation through Simulation. In: Sridhar, V., Padma, M. and Rao, K., Eds., Emerging Research in Electronics, Computer Science and Technology. Lecture Notes in Electrical Engineering, Vol. 545, Springer, Singapore, 1211-1228.  
https://doi.org/10.1007/978-981-13-5802-9_104</mixed-citation></ref><ref id="scirp.126938-ref129"><label>129</label><mixed-citation publication-type="other" xlink:type="simple">&amp;Ouml;nder, E.T., Sümer, B. and Baslamisli, S.&amp;Ccedil;. (2023) Estimation of Heat Transfer Model Parameters by Using Recursive Least Square (RLS) Method for a Shape Memory Alloy Wire. Journal of Intelligent Material Systems and Structures, 34, 379-392. https://doi.org/10.1177/1045389X221105892</mixed-citation></ref><ref id="scirp.126938-ref130"><label>130</label><mixed-citation publication-type="other" xlink:type="simple">Liu, Y., Liu, H., Wu, H. and Zou, D. (2016) Modelling and Compensation of Hysteresis in Piezoelectric Actuators Based on Maxwell Approach. Electronics Letters, 52, 188-190. https://doi.org/10.1049/el.2015.3138</mixed-citation></ref><ref id="scirp.126938-ref131"><label>131</label><mixed-citation publication-type="other" xlink:type="simple">Chen, J., Shang, H., Xia, D., Wang, S., Peng, T. and Zang, C. (2023) A Modified Vector Jiles-Atherton Hysteresis Model for the Design of Hysteresis Devices. IEEE Transactions on Energy Conversion. https://doi.org/10.1109/TEC.2023.3243101</mixed-citation></ref><ref id="scirp.126938-ref132"><label>132</label><mixed-citation publication-type="other" xlink:type="simple">Li, Y., et al. (2023) Modified Jiles-Atherton Model for Dynamic Magnetization in X-Space Magnetic Particle Imaging. IEEE Transactions on Biomedical Engineering, 70, 2035-2045. https://doi.org/10.1109/TBME.2023.3234256</mixed-citation></ref><ref id="scirp.126938-ref133"><label>133</label><mixed-citation publication-type="other" xlink:type="simple">Benabou, A., Leite, J.V., Clenet, S., Sim&amp;atilde;o, C. and Sadowski, N. (2008) Minor Loops Modelling with a Modified Jiles-Atherton Model and Comparison with the Preisach Model. Journal of Magnetism and Magnetic Materials, 320, e1034-e1038.  
https://doi.org/10.1016/j.jmmm.2008.04.092</mixed-citation></ref><ref id="scirp.126938-ref134"><label>134</label><mixed-citation publication-type="other" xlink:type="simple">Ru, C., Chen, L., Shao, B., Rong, W. and Sun, L. (2009) A Hysteresis Compensation Method of Piezoelectric Actuator: Model, Identification and Control. Control Engineering Practice, 17, 1107-1114. https://doi.org/10.1016/j.conengprac.2009.04.013</mixed-citation></ref><ref id="scirp.126938-ref135"><label>135</label><mixed-citation publication-type="other" xlink:type="simple">Chuntao, L. and Yonghong, T. (2004) A Neural Networks Model for Hysteresis Nonlinearity. Sensors and Actuators A: Physical, 112, 49-54.  
https://doi.org/10.1016/j.sna.2003.11.016</mixed-citation></ref><ref id="scirp.126938-ref136"><label>136</label><mixed-citation publication-type="other" xlink:type="simple">Dong, R., Tan, Y., Hui, C. and Xie, Y. (2008) A Neural Networks Based Model for Rate-Dependent Hysteresis for Piezoceramic Actuators. Sensors and Actuators A: Physical, 143, 370-376. https://doi.org/10.1016/j.sna.2007.11.023</mixed-citation></ref><ref id="scirp.126938-ref137"><label>137</label><mixed-citation publication-type="other" xlink:type="simple">Yang, C.-H. and Chang, K.-M. (2006) Adaptive Neural Network Control for Piezoelectric Hysteresis Compensation in a Positioning System. 2006 IEEE International Symposium on Industrial Electronics, Montreal, 9-13 July 2006, 829-834.  
https://doi.org/10.1109/ISIE.2006.295742</mixed-citation></ref><ref id="scirp.126938-ref138"><label>138</label><mixed-citation publication-type="other" xlink:type="simple">Quondam-Antonio, S., Riganti-Fulginei, F., Laudani, A., Lozito, G.-M. and Scorretti, R. (2023) Deep Neural Networks for the Efficient Simulation of Macro-Scale Hysteresis Processes with Generic Excitation Waveforms. Engineering Applications of Artificial Intelligence, 121, Article ID: 105940.  
https://doi.org/10.1016/j.engappai.2023.105940</mixed-citation></ref><ref id="scirp.126938-ref139"><label>139</label><mixed-citation publication-type="other" xlink:type="simple">Zou, Y. and Wang, B. (2006) Fragmental Ellipse Fitting Based on Least Square Algorithm. Chinese Journal of Scientific Instrument, 27, 808-812. (In Chinese)</mixed-citation></ref><ref id="scirp.126938-ref140"><label>140</label><mixed-citation publication-type="other" xlink:type="simple">Han, W., Shao, S., Zhang, S., Tian, Z. and Xu, M. (2022) Design and Modeling of Decoupled Miniature Fast Steering Mirror with Ultrahigh Precision. Mechanical Systems and Signal Processing, 167, Article ID: 108521.  
https://doi.org/10.1016/j.ymssp.2021.108521</mixed-citation></ref><ref id="scirp.126938-ref141"><label>141</label><mixed-citation publication-type="book" xlink:type="simple">Meng, Y., Zhao, K. and Guo, P. (2022) Experimental Investigation of Coupled Hysteretic Thermo-Electro-Mechanical Properties of Piezo Stack Actuator. In: Wang, Y., Martinsen, K., Yu, T. and Wang, K., Eds., Advanced Manufacturing and Automation XI. IWAMA 2021. Lecture Notes in Electrical Engineering, Vol. 880, Springer, Singapore, 466-471. https://doi.org/10.1007/978-981-19-0572-8_59</mixed-citation></ref><ref id="scirp.126938-ref142"><label>142</label><mixed-citation publication-type="other" xlink:type="simple">Feng, Y., Hu, Z. and Liang, M. (2023) Modelling of Piezoelectric Actuating Systems Subjected to Variable Loads and Frequencies and Applications to Prescribed Performance Control. International Journal of Control, 96, 2356-2373.  
https://doi.org/10.1080/00207179.2022.2094836</mixed-citation></ref><ref id="scirp.126938-ref143"><label>143</label><mixed-citation publication-type="other" xlink:type="simple">Habibullah, H. (2020) 30 Years of Atomic Force Microscopy: Creep, Hysteresis, Cross-Coupling, and Vibration Problems of Piezoelectric Tube Scanners. Measurement, 159, Article ID: 107776. https://doi.org/10.1016/j.measurement.2020.107776</mixed-citation></ref><ref id="scirp.126938-ref144"><label>144</label><mixed-citation publication-type="other" xlink:type="simple">M&amp;ouml;rée, G. and Leijon, M. (2023) Review of Hysteresis Models for Magnetic Materials. Energies, 16, Article No. 3908. https://doi.org/10.3390/en16093908</mixed-citation></ref><ref id="scirp.126938-ref145"><label>145</label><mixed-citation publication-type="other" xlink:type="simple">Chen, J., Peng, G., Hu, H. and Ning, J. (2020) Dynamic Hysteresis Model and Control Methodology for Force Output Using Piezoelectric Actuator Driving. IEEE Access, 8, 205136-205147. https://doi.org/10.1109/ACCESS.2020.3037216</mixed-citation></ref><ref id="scirp.126938-ref146"><label>146</label><mixed-citation publication-type="other" xlink:type="simple">Rupnik, U., Alic, A. and Miljavec, D. (2022) Harmonization and Validation of Jiles-Atherton Static Hysteresis Models. Energies, 15, Article No. 6760.  
https://doi.org/10.3390/en15186760</mixed-citation></ref><ref id="scirp.126938-ref147"><label>147</label><mixed-citation publication-type="other" xlink:type="simple">Zhou, C., Feng, C., Aye, Y.N. and Ang, W.T. (2021) A Digitized Representation of the Modified Prandtl-Ishlinskii Hysteresis Model for Modeling and Compensating Piezoelectric Actuator Hysteresis. Micromachines, 12, Article No. 942.  
https://doi.org/10.3390/mi12080942</mixed-citation></ref><ref id="scirp.126938-ref148"><label>148</label><mixed-citation publication-type="other" xlink:type="simple">Zhang, S., Zhao, H., Ma, X., Deng, J. and Liu, Y. (2022) A 3-DOF Piezoelectric Micromanipulator Based on Symmetric and Antisymmetric Bending of a Cross-Shaped Beam. IEEE Transactions on Industrial Electronics, 70, 8264-8275.  
https://doi.org/10.1109/TIE.2022.3213906</mixed-citation></ref><ref id="scirp.126938-ref149"><label>149</label><mixed-citation publication-type="other" xlink:type="simple">Sabarianand, D.V., Karthikeyan, P. and Muthuramalingam, T. (2020) A Review on Control Strategies for Compensation of Hysteresis and Creep on Piezoelectric Actuators Based Micro Systems. Mechanical Systems and Signal Processing, 140, Article ID: 106634. https://doi.org/10.1016/j.ymssp.2020.106634</mixed-citation></ref><ref id="scirp.126938-ref150"><label>150</label><mixed-citation publication-type="other" xlink:type="simple">Li, J., Zhang, L., Li, S., Mao, Q. and Mao, Y. (2023) Active Disturbance Rejection Control for Piezoelectric Smart Structures: A Review. Machines, 11, Article No. 174. https://doi.org/10.3390/machines11020174</mixed-citation></ref><ref id="scirp.126938-ref151"><label>151</label><mixed-citation publication-type="other" xlink:type="simple">Qin, Y., Tian, Y., Zhang, D., Shirinzadeh, B. and Fatikow, S. (2013) A Novel Direct Inverse Modeling Approach for Hysteresis Compensation of Piezoelectric Actuator in Feedforward Applications. IEEE/ASME Transactions on Mechatronics, 18, 981-989.  
https://doi.org/10.1109/TMECH.2012.2194301</mixed-citation></ref><ref id="scirp.126938-ref152"><label>152</label><mixed-citation publication-type="other" xlink:type="simple">Qin, Y., Duan, H. and Han, J. (2021) Direct Inverse Hysteresis Compensation of Piezoelectric Actuators Using Adaptive Kalman Filter. IEEE Transactions on Industrial Electronics, 69, 9385-9395. https://doi.org/10.1109/TIE.2021.3114741</mixed-citation></ref><ref id="scirp.126938-ref153"><label>153</label><mixed-citation publication-type="other" xlink:type="simple">Rakotondrabe, M. (2010) Bouc-Wen Modeling and Inverse Multiplicative Structure to Compensate Hysteresis Nonlinearity in Piezoelectric Actuators. IEEE Transactions on Automation Science and Engineering, 8, 428-431.  
https://doi.org/10.1109/TASE.2010.2081979</mixed-citation></ref><ref id="scirp.126938-ref154"><label>154</label><mixed-citation publication-type="other" xlink:type="simple">Qin, Y., Zhang, Y., Duan, H. and Han, J. (2021) High-Bandwidth Hysteresis Compensation of Piezoelectric Actuators via Multilayer Feedforward Neural Network Based Inverse Hysteresis Modeling. Micromachines, 12, Article No. 1325.  
https://doi.org/10.3390/mi12111325</mixed-citation></ref><ref id="scirp.126938-ref155"><label>155</label><mixed-citation publication-type="other" xlink:type="simple">Ang, W.T., Khosla, P.K. and Riviere, C.N. (2007) Feedforward Controller with Inverse Rate-Dependent Model for Piezoelectric Actuators in Trajectory-Tracking Applications. IEEE/ASME Transactions on Mechatronics, 12, 134-142.  
https://doi.org/10.1109/TMECH.2007.892824</mixed-citation></ref><ref id="scirp.126938-ref156"><label>156</label><mixed-citation publication-type="other" xlink:type="simple">Dong, R., Tan, Y., Xie, Y. and Li, X. (2023) A Dynamic Hysteresis Model of Piezoelectric Ceramic Actuators. Chinese Journal of Electronics, 32, 1-8.</mixed-citation></ref><ref id="scirp.126938-ref157"><label>157</label><mixed-citation publication-type="other" xlink:type="simple">Zhong, B., Liu, S., Wang, C., Jin, Z. and Sun, L. (2023) A Novel Feedforward Model of Piezoelectric Actuator for Precision Rapid Cutting. Materials, 16, Article No. 2271. https://doi.org/10.3390/ma16062271</mixed-citation></ref><ref id="scirp.126938-ref158"><label>158</label><mixed-citation publication-type="other" xlink:type="simple">An, D., et al. (2023) Compensation Method for the Nonlinear Characteristics with Starting Error of a Piezoelectric Actuator in Open-Loop Controls Based on the DSPI Model. Micromachines, 14, Article No. 742. https://doi.org/10.3390/mi14040742</mixed-citation></ref><ref id="scirp.126938-ref159"><label>159</label><mixed-citation publication-type="other" xlink:type="simple">Wu, Y., Chen, H., Sun, N., Fan, Z. and Fang, Y. (2023) Neural Network Based Adaptive Control for a Piezoelectric Actuator with Model Uncertainty and Unknown External Disturbance. International Journal of Robust and Nonlinear Control, 33, 2251-2272. https://doi.org/10.1002/rnc.6517</mixed-citation></ref><ref id="scirp.126938-ref160"><label>160</label><mixed-citation publication-type="other" xlink:type="simple">Savoie, M. and Shan, J. (2022) Temperature-Dependent Asymmetric Prandtl-Ishlinskii Hysteresis Model for Piezoelectric Actuators. Smart Materials and Structures, 31, Article ID: 055022. https://doi.org/10.1088/1361-665X/ac6552</mixed-citation></ref><ref id="scirp.126938-ref161"><label>161</label><mixed-citation publication-type="other" xlink:type="simple">Baziyad, A.G., Nouh, A.S., Ahmad, I. and Alkuhayli, A. (2022) Application of Least-Squares Support-Vector Machine Based on Hysteresis Operators and Particle Swarm Optimization for Modeling and Control of Hysteresis in Piezoelectric Actuators. Actuators, 11, Article No. 217. https://doi.org/10.3390/act11080217</mixed-citation></ref><ref id="scirp.126938-ref162"><label>162</label><mixed-citation publication-type="other" xlink:type="simple">Ji, H.-W., et al. (2023) Modeling and Control of Rate-Dependent Hysteresis Characteristics of Piezoelectric Actuators Based on Analog Filters. Ferroelectrics, 603, 94-115. https://doi.org/10.1080/00150193.2022.2159223</mixed-citation></ref><ref id="scirp.126938-ref163"><label>163</label><mixed-citation publication-type="other" xlink:type="simple">Li, W., Liu, K., Yang, Z. and Wang, W. (2022) Dynamic Modeling and Disturbance Rejection Compensation for Hysteresis Nonlinearity of High Voltage Piezoelectric Stack Actuators. Smart Materials and Structures, 32, Article ID: 025007.  
https://doi.org/10.1088/1361-665X/acad4e</mixed-citation></ref><ref id="scirp.126938-ref164"><label>164</label><mixed-citation publication-type="other" xlink:type="simple">Gu, G.-Y., Yang, M.-J. and Zhu, L.-M. (2012) Real-Time Inverse Hysteresis Compensation of Piezoelectric Actuators with a Modified Prandtl-Ishlinskii Model. Review of Scientific Instruments, 83, Article ID: 065106.  
https://doi.org/10.1063/1.4728575</mixed-citation></ref><ref id="scirp.126938-ref165"><label>165</label><mixed-citation publication-type="other" xlink:type="simple">Ko, Y.-R., Hwang, Y., Chae, M. and Kim, T.-H. (2017) Direct Identification of Generalized Prandtl-Ishlinskii Model Inversion for Asymmetric Hysteresis Compensation. ISA Transactions, 70, 209-218. https://doi.org/10.1016/j.isatra.2017.07.004</mixed-citation></ref><ref id="scirp.126938-ref166"><label>166</label><mixed-citation publication-type="other" xlink:type="simple">Lallart, M., Li, K., Yang, Z., Zhou, S. and Wang, W. (2020) Simple and Efficient Inverse Hysteretic Model and Associated Experimental Procedure for Precise Piezoelectric Actuator Control and Positioning. Sensors and Actuators A: Physical, 301, Article ID: 111674. https://doi.org/10.1016/j.sna.2019.111674</mixed-citation></ref><ref id="scirp.126938-ref167"><label>167</label><mixed-citation publication-type="other" xlink:type="simple">Zhang, Q., Gao, Y., Li, Q. and Yin, D. (2021) Adaptive Compound Control Based on Generalized Bouc-Wen Inverse Hysteresis Modeling in Piezoelectric Actuators. Review of Scientific Instruments, 92, Article ID: 115004.  
https://doi.org/10.1063/5.0059368</mixed-citation></ref><ref id="scirp.126938-ref168"><label>168</label><mixed-citation publication-type="other" xlink:type="simple">Son, N.N., Van Kien, C. and Anh, H.P.H. (2022) Adaptive Sliding Mode Control with Hysteresis Compensation-Based Neuroevolution for Motion Tracking of Piezoelectric Actuator. Applied Soft Computing, 115, Article ID: 108257.  
https://doi.org/10.1016/j.asoc.2021.108257</mixed-citation></ref><ref id="scirp.126938-ref169"><label>169</label><mixed-citation publication-type="other" xlink:type="simple">Tan, U.-X., Win, T. and Ang, W.T. (2006) Modeling Piezoelectric Actuator Hysteresis with Singularity Free Prandtl-Ishlinskii Model. 2006 IEEE International Conference on Robotics and Biomimetics, Kunming, 17-20 December 2006, 251-256.  
https://doi.org/10.1109/ROBIO.2006.340162</mixed-citation></ref><ref id="scirp.126938-ref170"><label>170</label><mixed-citation publication-type="other" xlink:type="simple">Yang, X., Li, W., Wang, Y., Ye, G. and Su, X. (2009) Hysteresis Modeling of Piezo Actuator Using Neural Networks. 2008 IEEE International Conference on Robotics and Biomimetics, Bangkok, 22-25 February 2009, 988-991.  
https://doi.org/10.1109/ROBIO.2009.4913134</mixed-citation></ref><ref id="scirp.126938-ref171"><label>171</label><mixed-citation publication-type="other" xlink:type="simple">Gan, J., Zhang, X. and Wu, H. (2016) Tracking Control of Piezoelectric Actuators Using a Polynomial-Based Hysteresis Model. AIP Advances, 6, Article ID: 065204.  
https://doi.org/10.1063/1.4953597</mixed-citation></ref><ref id="scirp.126938-ref172"><label>172</label><mixed-citation publication-type="other" xlink:type="simple">Al Janaideh, M. and Aljanaideh, O. (2018) Further Results on Open-Loop Compensation of Rate-Dependent Hysteresis in a Magnetostrictive Actuator with the Prandtl-Ishlinskii Model. Mechanical Systems and Signal Processing, 104, 835-850.  
https://doi.org/10.1016/j.ymssp.2017.09.004</mixed-citation></ref><ref id="scirp.126938-ref173"><label>173</label><mixed-citation publication-type="other" xlink:type="simple">Tao, Y.-D., Li, H.-X. and Zhu, L.-M. (2019) Rate-Dependent Hysteresis Modeling and Compensation of Piezoelectric Actuators Using Gaussian Process. Sensors and Actuators A: Physical, 295, 357-365. https://doi.org/10.1016/j.sna.2019.05.046</mixed-citation></ref><ref id="scirp.126938-ref174"><label>174</label><mixed-citation publication-type="other" xlink:type="simple">Al Janaideh, M., Al Saaideh, M. and Rakotondrabe, M. (2020) On Hysteresis Modeling of a Piezoelectric Precise Positioning System under Variable Temperature. Mechanical Systems and Signal Processing, 145, Article ID: 106880.  
https://doi.org/10.1016/j.ymssp.2020.106880</mixed-citation></ref><ref id="scirp.126938-ref175"><label>175</label><mixed-citation publication-type="other" xlink:type="simple">Wang, W., et al. (2020) Research on Asymmetric Hysteresis Modeling and Compensation of Piezoelectric Actuators with PMPI Model. Micromachines, 11, Article No. 357. https://doi.org/10.3390/mi11040357</mixed-citation></ref><ref id="scirp.126938-ref176"><label>176</label><mixed-citation publication-type="other" xlink:type="simple">Shan, X., Song, H., Cao, H., Zhang, L., Zhao, X. and Fan, J. (2021) A Dynamic Hysteresis Model and Nonlinear Control System for a Structure-Integrated Piezoelectric Sensor-Actuator. Sensors, 21, Article No. 269. https://doi.org/10.3390/s21010269</mixed-citation></ref><ref id="scirp.126938-ref177"><label>177</label><mixed-citation publication-type="other" xlink:type="simple">Xu, M., Su, L.-R. and Chen, S.-T. (2023) Improved PI Hysteresis Model with One-Sided Dead-Zone Operator for Soft Joint Actuator. Sensors and Actuators A: Physical, 349, Article ID: 114072. https://doi.org/10.1016/j.sna.2022.114072</mixed-citation></ref><ref id="scirp.126938-ref178"><label>178</label><mixed-citation publication-type="other" xlink:type="simple">Feng, Y. and Li, Y. (2020) System Identification of Micro Piezoelectric Actuators via Rate-Dependent Prandtl-Ishlinskii Hysteresis Model Based on a Modified PSO Algorithm. IEEE Transactions on Nanotechnology, 20, 205-214.  
https://doi.org/10.1109/TNANO.2020.3034965</mixed-citation></ref><ref id="scirp.126938-ref179"><label>179</label><mixed-citation publication-type="other" xlink:type="simple">Louis, A., Valérie, P.-B. and Jo&amp;euml;l, B.-G. (2023) Comparison of Control Strategies for Hysteresis Attenuation in Electromechanical Actuators Subject to Dispersion. Control Engineering Practice, 130, Article ID: 105348.  
https://doi.org/10.1016/j.conengprac.2022.105348</mixed-citation></ref><ref id="scirp.126938-ref180"><label>180</label><mixed-citation publication-type="other" xlink:type="simple">Zhang, Y., Wu, J., Huang, P., Su, C.-Y. and Wang, Y. (2023) Inverse Dynamics Modelling and Tracking Control of Conical Dielectric Elastomer Actuator Based on GRU Neural Network. Engineering Applications of Artificial Intelligence, 118, Article ID: 105668. https://doi.org/10.1016/j.engappai.2022.105668</mixed-citation></ref><ref id="scirp.126938-ref181"><label>181</label><mixed-citation publication-type="other" xlink:type="simple">Yang, L., Zhao, Z., Zhang, Y. and Li, D. (2021) Rate-Dependent Modeling of Piezoelectric Actuators for Nano Manipulation Based on Fractional Hammerstein model. Micromachines, 13, Article No. 42. https://doi.org/10.3390/mi13010042</mixed-citation></ref></ref-list></back></article>