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F. L. Degeterkin, A. G. Onaran, M. Balantekin, W. Lee, N. A. Hall and C. F. Quate, “Sensor for Direct Measurement of Interaction Forces in Probe Microscopy,” Applied Physics Letters, Vol. 87, No. 21, 2005.
http://dx.doi.org/10.1063/1.2136430.

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