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T. Kanda, A. Makino, K. Suzumori, T. Morita and M. K. Kurosawa, “A Cylindrical Micro Ultrasonic Motor using a Micro-Machined Bulk Piezoelectric Transducer,” IEEE Ultrasonics Symposium, Vol. 2, 27-28 August 2004, pp. 1298-1301. doi:10.1109/ULTSYM.2004.1418028

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