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Louro, C., Cavaleiro, A., Dub, S., Smid, P., Musil, J. and Vlcek, J. (2002) The depth profile analysis of W-Si-N coatings after thermal annealing. Surface and Coatings Technology, 161(2-3), 111-119. doi:10.1016/S0257-8972(02)00325-0

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