TITLE:
Three-Dimensional Simulations with Fields and Particles in Software and Inflector Designs
AUTHORS:
Branislav Radjenović, Marija Radmilović-Radjenović, Petar Beličev
KEYWORDS:
Fields; Particles; Simulations; Finite Elements; Inflector; Profile Evolution; Level Set Method
JOURNAL NAME:
Journal of Software Engineering and Applications,
Vol.6 No.8,
July
26,
2013
ABSTRACT: Particles and fields represent two
major modeling paradigms in pure and applied science at all. In this paper a
methodology and some of
the results for three-dimensional (3D) simulations that include both field and
particle abstractions are presented. Electromagnetic field calculations used
here are based on the discrete differential form representation of the finite
elements method, while the Monte Carlo method makes foundation of the particle
part of the simulations. The first example is the simulation of the feature
profile evolution during SiO2 etching enhanced by Ar + /CF4 non-equilibrium plasma based on the sparse field
method for solving level set equations. Second example is devoted to the design
of a spiral inflector which is one of the key devices of the axial injection
system of the VINCY Cyclotron.