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A. Öztekin, D. E. Bornside, R. A. Brown and P. K. Seidel, “The Connection between Hydrodynamic Stability of Gas Flow in Spin Coating and Coated Film Uniformity,” Journal of Applied Physics, Vol. 77, No. 6, 1995, pp. 2297-2308. doi:10.1063/1.358751

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