TITLE:
Maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device
AUTHORS:
Xiang-Yu Ding, Yu-Xuan Ren, Rong-De Lu
KEYWORDS:
Digital Micro-mirror Device (DMD); Laser Shaping; Maskless Projection; Soft Lithography
JOURNAL NAME:
Optics and Photonics Journal,
Vol.3 No.2B,
July
22,
2013
ABSTRACT: Laser shaping was introduced to maskless
projection soft lithography by using digital micro-mirror device (DMD). The
predesigned intensity pattern was imprinted onto the DMD and the input laser
beam with a Gaussian or quasi-Gaussian
distribution will carry the pattern on DMD
to etch the resin. It provides a method of precise control of laser beam shapes
andphoton-induced curing behavior of resin. This
technology provides an accurate micro-fabrication of microstructures used for
micro-systems. As a virtual mask generator and a binary-amplitude spatial light
modulator, DMD is equivalent to the masks in the
conventional exposure system. As the virtual masks and shaped laser beam can be
achieved flexibly, it is a good method of precision soft lithography for 2D/3D
microstructures.