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A. W. Ott, J. W. Klaus, J. M. Johnson and S. M. George, “Al2O3 Thin Film Growth on Si(100) Using Binary Reaction Sequence Chemistry,” Thin Solid Films, Vol. 292, No. 1-2, 1997, pp. 135-144. doi:10.1016/S0040-6090(96)08934-1

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