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A. C. Dillon, A. W. Ott, J. D. Way and S. M. George, “Surface Chemistry of Al2O3, Deposition Using Al(CH3)3 and H2O in a Binary Reaction Sequence,” Surface Science, Vol. 322, No. 1-3, 1995, pp. 230-242. doi:10.1016/0039-6028(95)90033-0

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