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M. Nagatsu, T. Sano, N. Takada, N. Toyoda, M. Tanga and H. Sugai, “Characteristics of Hydrogenated Amorphous Carbon Films Deposited by Large-Area Microwave-Sustained Surface Wave Plasma,” Diamond and Related Materials, Vol. 11, No. 3-6, 2002, pp. 976-979. doi:10.1016/S0925-9635(01)00616-1

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