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X. Wang, H. R. Harris, K. Bouldin, H. Temkin, S. Gangopadhyay, M. D. Strathman and M. West, “Structural Properties of Fluorinated Amorphous Carbon Films,” Journal of Applied Physics, Vol. 87, No. 1, 2000, pp. 621-623. doi:10.1063/1.371910

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