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M. Ritala, K. Kukli, A. Rahtu, P. Risnen, M. Leskel, T. Sajavaara and J. Keinonen, “Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources,” Science, Vol. 288, No. 5464, 2000, pp. 319-321. doi:10.1126/science.288.5464.319

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