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J. Wang, X. Xia and X. Li, “Monolithic Integration of Pressure plus Acceleration Composite TPMS Sensors with a Single-Sided Micromachining Technology,” Journal of Microelectromechanical Systems, Vol. 21, No. 2, 2012, pp. 284-293. doi:10.1109/JMEMS.2011.2178117

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