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S. Ulrich, A. Kratzsch, H. Leiste, M. Stuber, P. Schloβmacher, H. Holleck, J. Binder, D. Schild, S. Westermeyer, P. Becker and H. Oechsner, “Variation of Carbon Concentration, Ion Energy, and Ion Current Density of Magnetron-Sputtered Boron Carbonitride Films,” Surface and Coating Technology, Vol. 116-119, 1999, pp. 742-750. doi:10.1016/S0257-8972(99)00353-9

has been cited by the following article:

• TITLE: Hexagonal Nano-Crystalline BCN Films Grown on Si (100) Substrate Studied by X-Ray Absorption Spectroscopy

  AUTHORS: Md. Abdul Mannan, Yuji Baba, Norie Hirao, Tetsuya Kida, Masamitsu Nagano, Hideyuki Noguchi

  KEYWORDS: Nano-Crystalline; h-BCN Films; Synchrotron Radiation; XPS; NEXAFS; Orientation

  JOURNAL NAME: Materials Sciences and Applications, Vol.4 No.5A, May 23, 2013

  ABSTRACT: Hexagonal nano-crystalline boron carbonitride (h-BCN) films grown on Si (100) substrate have been precisely investigated. The films were synthesized by radio frequency plasma enhanced chemical vapor deposition using tris-dimethylamino borane as a single-source molecular precursor. The deposition was performed by setting RF power at 400 - 800 W. The reaction pressure was at 2.6 Pa and the substrate temperature was recorded at 700°C - 800°C. Formation of the nano-crystalline h-BCN compound has been confirmed by X-ray diffraction analysis. The diffraction peaks at 26.3° together with a small unknown peak at 29.2° were elucidated due to the formation of an h-BCN structure. The films composed of B, C, and N atoms with different B-N, B-C, C-N chemical bonds in forming the sp2-BCN atomic configuration studied by X-ray photoelectron spectroscopy. Orientation and local structures of the h-BCN hybrid were studied by near-edge X-ray absorption fine structure (NEXAFS) measurements. The dominant presence of p* and s* resonance peaks of the sp2-hybrid orbitals in the B K-edge NEXAFS spectra revealed the formation of the sp2-BCN configuration around B atoms like-BN3 in h-BN. The orientation was suggested on the basis of the polarization dependence of B K-edge and N K-edge of the NEXAFS spectra.