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N. Fainer, Y. Rumyantsev, M. Kosinova, E. Maximovski, V. Kesler, V. Kirienko and F. Kuznetsov, “Low-k Dielectrics on Base of Silicon Carbon Nitride Films,” Surface and Coatings Technology, Vol. 201, No. 22, 2007, pp. 9269-9274. doi:10.1016/j.surfcoat.2007.04.046

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