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Y. Omura, S. Nakashima, K. Izumi and T. Ishii, “0.1-μm Gate, Ultrathin-Film CMOS Devices Using SIMOX Substrate with 80-nm-Thick Buried Oxide Layer,” IEEE Transactions on Electron Devices, Vol. 40, No. 5, 1993, pp. 1019-1022. doi:10.1109/16.210214
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