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J. T. Hastings, M. H. Lim, J. G. Goodberlet and H. I. Smith, “Optical Waveguides with Apodized Sidewall Gratings via Spatial-Phase-Locked Electron-Beam Lithography,” Journal of Vacuum Science & Technology B, Vol. 20, No. 6, 2002, pp. 2753-2757. doi:10.1116/1.1521744

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