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K. K. Leang and S. Devasia, “Feedback-Linearized Inverse Feedforward for Creep, Hysteresis, and Vibration Compensation in AFM Piezoactuators,” IEEE Transactions on Control Systems Technology, Vol. 15, No. 5, 2007, pp. 927-935. doi:10.1109/TCST.2007.902956

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