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G. M. Clayton, S. Tien, A. J. Fleming, S. O. R. Moheimani and S. Devasia, “Inverse-Feedforward of ChargeControlled Piezopositioners,” Mechatronics, Vol. 18, No. 5-6, 2008, pp. 273-281. doi:10.1016/j.mechatronics.2007.07.006

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