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E. Hong, R. Smith, S. V. Krishnaswamy, C. B. Freidholff, and S. Trolier-McKinstry, “Residual Stress Development in Pb(Zr,Ti)O3/ZrO2/SiO2 Stacks for Piezoelectric Microactuators,” Thin Solid Films, Vol. 510, No. 1-2, 2006, pp. 213-221. doi:10.1016/j.tsf.2005.12.300

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