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C. M. Lew, Y. Liu, B. Day, G. M. Kloster, H. Tiznado, M. Sun, F. Zaera, J. Wang and Y. Yan, “Hydrofluoric-Acid- Resistant and Hydrophobic Pure-Silica-Zeolite MEL Low-Dielectric-Constant Films,” Langmuir, Vol. 25, No. 9, 2009, pp. 5039-5044. doi:10.1021/la803956w
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