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A. Beaumont, C. Dubuc, J. Beauvais and D. Drouin, “A Nanodamascene Process for Advanced Single-Electron Transistor Fabrication,” IEEE Transactions on Nanotechnologyon, Vol. 7, No. 1, 2009, pp. 68-73. doi:10.1109/TNANO.2007.91343010

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