TITLE:
Stable Adaptive Fuzzy Control with Hysteresis Observer for Three-Axis Micro/Nano Motion Stages
AUTHORS:
Lih-Chang Lin, Bor-Yih Chang, Biing-Der Liaw
KEYWORDS:
Micro/Nano Stage; Adaptive Fuzzy Control; Hysteresis Observer; Fuzzy Function Approximator
JOURNAL NAME:
Intelligent Control and Automation,
Vol.3 No.4,
November
28,
2012
ABSTRACT: This paper considers the analytical dynamics with simplified Dahl hysteresis model for a three-axis piezoactuated micro/nano flexure stage. An adaptive controller with nonlinear dynamic hysteresis observer is proposed using Lyapunov stability theory. In the controller, a fuzzy function approximator with parameters update law is included to compensate for the identification inaccuracy, model uncertainty, and flexure coupling effects. Simulation results are used to demonstrate the control performance.