Article citationsMore>>
V. Bouquet, S. M. Zanetti, C. R. Foschini, E. R. Leite, E. Longo and J. A. Varela, In: N. P. Bansal, K. V. Logan and J. P. Singh, Eds., Innovative Processing and Synthesis of Ceramic, Glasses, and Composites, Ceramic Transactions, The American Ceramic Society Inc., Wes-terville, Vol. 85, 1998, p. 333.
has been cited by the following article:
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TITLE:
Synthesis and Electrical Characterization of BaTiO3 Thin Films on Si(100)
AUTHORS:
V. R. Chinchamalatpure, S. A. Ghosh, G. N. Chaudhari
KEYWORDS:
Sol-Gel Technique, BaTiO3 Thin Film, C-V, I-V
JOURNAL NAME:
Materials Sciences and Applications,
Vol.1 No.4,
October
29,
2010
ABSTRACT: BaTiO3 thin film has been deposited on Si(100) substrate using sol-gel process and deposited by using spin – coating technique. The BaTiO3/Si(100) structures were studied by structural and electrical characteristics. The X-ray diffrac-tion of BaTiO3/Si(100) shows that the diffraction peaks become increasing sharp with increasing calcination tempera-tures indicating the enhance crystallinity of the films. Scanning electron microscopy of BaTiO3 thin films shows the crack free and uniform nature. The capacitance-voltage measurement of BaTiO3 thin film deposited on Si(100) an-nealed at 600℃ shows large frequency dispersion in the accumulation region. The current-voltage measurement of BaTiO3/Si shows the ideality factor was approaches to unity at 600℃.