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M. Miyake, J.F. Scott, X J. Lou, F.D. Morrison, T. Nonaka, S. Motoyama, T. Tatsuta and O. Tsuji, “Submicron three-dimensional trenched electrodes and capacitors for DRAMs and FRAMs: Fabrication and electrical testing”, Journal of Applied Physics, Vol. 104, No. 6, 2008, 064112. doi:10.1063/1.2981197

has been cited by the following article:

• TITLE: Phase Transformations in PZT Thin Films Prepared by Polymeric Chemical Method

  AUTHORS: Elton C. Lima, Eudes Borges Araújo

  KEYWORDS: PZT; Thin Films; Phase Transformation

  JOURNAL NAME: Advances in Materials Physics and Chemistry, Vol.2 No.3, September 28, 2012

  ABSTRACT: Lead zirconate titanate Pb(Zr0.50Ti0.50)O3 (PZT) thin films were deposited by a polymeric chemical method on Pt(111)/ Ti/SiO2/Si substrates to understand the mechanisms of phase transformations in these films. PZT films pyrolyzed at temperatures higher than 350℃ present a coexistence of pyrochlore and perovskite phases, while only perovskite phase is present in films pyrolyzed at temperatures lower than 300℃. For films where the pyrochlore and perovskite phase coexists the amount of pyrochlore phase decreases from top surface to the bottom film-electrode interface and the PZT structure near top surface are Ti-rich compositions while near the bottom film-electrode interface the compositions are Zr-rich. For pyrochlore-free PZT thin film, a small (100) orientation tendency near the film-electrode interface was observed.