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D. J. Beebe, A. S. Hsieh, D. D. Denton and R. G. Radwin, “A Silicon Force Sensor for Robotics and Medicine,” Sensors and Actuators A: Physical, Vol. 50, No. 1-2, 1995, pp. 55-65. doi:10.1016/0924-4247(96)80085-9
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