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Z. Wen, Y. Wu, Z. Zhang, S. Xu, S. Huang and Y. Li, “Development of an Integrated Vacuum Microelectronic Tactile Sensor Array,” Sensors and Actuators A: Physical, Vol. 103, No. 3, 2003, pp. 301-306.
doi:10.1016/S0924-4247(02)00392-8
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