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J. Dargahi, M. Parameswaran and S. Payandeh, “A Micromachined Piezoelectric Tactile Sensor for an Endoscopic Grasper—Theory, Fabrication and Experiments,” Journal of Microelectromechanical Systems, Vol. 9, No. 3, 2000, pp. 329-335. doi:10.1109/84.870059
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