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O. Holmgren, K. Kokkonen, T. Veijola, T. Mattila, V. Kaajakari, A. Oja, J. V. Knuuttila and M. Kaivola, “Analysis of Vibration Modes in a Micromechanical Square-Plate Resonator,” Journal of Micromechanics and Microengineering, Vol. 19, No. 1, 2009, Article ID: 015028.
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