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L. Petrossian, S. J. Wilk, P. Joshi, S. Hihath, S. M. Goodnick and T. J. Thornton, “Fabrication of Cylindrical Nanopores and Nanopore Arrays in Sili-con-on-Insulator Substrates,” Journal of Microelectromechanical Systems, Vol. 16, No. 6, 2007, pp. 1419- 1428. doi:10.1109/JMEMS.2007.908435

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