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N. W. Emanetoglu, C. Gorla, Y. Liu, S. Liang and Y. Lu, “Epitaxial ZnO Piezoelectric Thin Films for Saw Filters,” Materials Science in Semiconductor Processing, Vol. 2, No. 3, 1999, pp. 247-252. doi:10.1016/S1369-8001(99)00022-0

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