TITLE:
ZnO Films Deposited by MOD Method-Island Behavior Dependent on Thermal Environment during Annealing
AUTHORS:
Masato Ohmukai, Koichiro Nakamura
KEYWORDS:
Undoped ZnO, MOD Method, Transparency, Island Behavior, Marangoni Convection
JOURNAL NAME:
World Journal of Engineering and Technology,
Vol.14 No.4,
November
2,
2026
ABSTRACT: ZnO nowadays attracts much attention as a transparent conductor, because it does not require rare earth elements. In this study, undoped ZnO films were formed by a metalorganic decomposition (MOD) method; metalorganic liquid is spread over a glass substrate, dried on a hotplate, and then annealed in a furnace. The obtained film was found to have a complicated structure that apparently depends on temperature profiles on the substrate surface. It was concluded that the temperature control over the substrate is critical for obtaining a uniform film.