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Wu, J., Xu, Z., Liu, L., Hartmaier, A., Rommel, M., Nordlund, K., et al. (2021) MD Simulation Study on Defect Evolution and Doping Efficiency of P-Type Doping of 3C-SiC by Al Ion Implantation with Subsequent Annealing. Journal of Materials Chemistry C, 9, 2258-2275.
https://doi.org/10.1039/d0tc05374k

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