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Calabretta, C., Scuderi, V., Anzalone, R., Mauceri, M., Crippa, D., Cannizzaro, A., et al. (2021) Effect of Nitrogen and Aluminum Doping on 3C-SiC Heteroepitaxial Layers Grown on 4° Off-Axis Si (100). Materials, 14, Article 4400.
https://doi.org/10.3390/ma14164400

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