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Brzozowski, E., Kaminski, M., Taube, A., Sadowski, O., Krol, K. and Guziewicz, M. (2023) Carrier Trap Density Reduction at SiO2/4H-Silicon Carbide Interface with Annealing Processes in Phosphoryl Chloride and Nitride Oxide Atmospheres. Materials, 16, Article 4381.
https://doi.org/10.3390/ma16124381

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