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La Via, F., Severino, A., Anzalone, R., Bongiorno, C., Litrico, G., Mauceri, M., et al. (2018) From Thin Film to Bulk 3C-SiC Growth: Understanding the Mechanism of Defects Reduction. Materials Science in Semiconductor Processing, 78, 57-68.
https://doi.org/10.1016/j.mssp.2017.12.012

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