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Cao, Z., Deng, J., Liu, M. and Wang, Y. (2012) Bottleneck Prediction Method Based on Improved Adaptive Network-Based Fuzzy Inference System (ANFIS) in Semiconductor Manufacturing System. Chinese Journal of Chemical Engineering, 20, 1081-1088.
https://doi.org/10.1016/s1004-9541(12)60590-4

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