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Keskinbora, K., Grévent, C., Hirscher, M., Weigand, M. and Schütz, G. (2015) Single‐step 3D Nanofabrication of Kinoform Optics via Gray‐Scale Focused Ion Beam Lithography for Efficient X‐Ray Focusing. Advanced Optical Materials, 3, 792-800.
https://doi.org/10.1002/adom.201400411

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