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Jadoon, N.A.K., Puvanenthiram, V., Mosa, M.A.H., Sharma, A. and Wang, K. (2024) Recent Advances in Aluminum Nitride (ALN) Growth by Magnetron Sputtering Techniques and Its Applications. Inorganics, 12, Article 264.
https://doi.org/10.3390/inorganics12100264

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