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M. Modabberifar, Y. Hojjat, A. Abdullah and M. Dadkhah, “Analysis of the Dynamic Characteristics of a Three Phase Panel Type Electrostatic Actuator Using Pem System Identification Method,” Sensors and Actuators A: Physical, Vol. 151, No. 2, 2009, pp. 173-178. doi:10.1016/j.sna.2009.01.019

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