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Reddy, J.D., Volinsky, A.A., Frewin, C.L., Locke, C. and Saddow, S.E. (2007) Mechanical Properties of 3C-SiC Films for MEMS Applications. MRS Proceedings, 1049, Article No. 306.
https://doi.org/10.1557/proc-1049-aa03-06

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