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Bernstein, J. (2023). Supply Chain Priorities for Chemical Products in Semiconductor Manufacturing: What’s in It for Material Companies—A Review of CHIPS Act, Inflation Reduction Act (IRA), and Tax Incentives. Semiconductor Equipment and Materials International (SEMI) and American Chemistry Council.
https://www.semi.org/sites/semi.org/files/2023-03/Supply%20Chain%20Priorities%20for%20Chemical%20Products%20in%20Semiconductor%20Manufacturing.pdf

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