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Son, Y.H., Jung, W.C., Jeong, J.I., Park, N.G., Kim, I.S. and Bae, I.H. (2001) FTIR Characteristics of Hydrogenated Amorphous Carbon Films Prepared by ECR-PECVD. Journal of the Korean Physical Society, 39, 713-717.

has been cited by the following article:

• TITLE: No Effect of Ar Eximer Lamp on Diamond-Like Carbon Deposition by Photo Chemical Vapor Deposition

  AUTHORS: Masato Ohmukai, Tomoya Matsumoto

  KEYWORDS: Diamond-Like Carbon, Photo Chemical Vapor Deposition (CVD), Ar Excimer Lamp

  JOURNAL NAME: World Journal of Engineering and Technology, Vol.13 No.3, July 3, 2025

  ABSTRACT: Diamond-like carbon was deposited on glass substrates by a photo chemical vapor deposition method using methane and hydrogen gases as a starting material. Light from an Ar excimer lamp was tentatively applied to the deposition together with a mercury lamp. The experimental results show the effect of an Ar excimer lamp was not obtained, indicating that other condition is necessary to make use of the Ar excimer lamp.