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Tode, M., Takigawa, Y., Iguchi, T., Matsuura, H., Ohmukai, M. and Sasaki, W. (2007) Removal of Carbon Contamination on Si Wafers with an Excimer Lamp. Metallurgical and Materials Transactions A, 38, 596-598.
https://doi.org/10.1007/s11661-007-9104-y

has been cited by the following article:

• TITLE: No Effect of Ar Eximer Lamp on Diamond-Like Carbon Deposition by Photo Chemical Vapor Deposition

  AUTHORS: Masato Ohmukai, Tomoya Matsumoto

  KEYWORDS: Diamond-Like Carbon, Photo Chemical Vapor Deposition (CVD), Ar Excimer Lamp

  JOURNAL NAME: World Journal of Engineering and Technology, Vol.13 No.3, July 3, 2025

  ABSTRACT: Diamond-like carbon was deposited on glass substrates by a photo chemical vapor deposition method using methane and hydrogen gases as a starting material. Light from an Ar excimer lamp was tentatively applied to the deposition together with a mercury lamp. The experimental results show the effect of an Ar excimer lamp was not obtained, indicating that other condition is necessary to make use of the Ar excimer lamp.