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Marx, E., Malik, I.J., Strausser, Y.E., Bristow, T., Poduje, N. and Stover, J.C. (2002) Power Spectral Densities: A Multiple Technique Study of Different Si Wafer Surfaces. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 20, 31-41.
https://doi.org/10.1116/1.1428267

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