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Bourdillon, A.J., Boothroyd, C.B., Kong, J.R. and Vladimirsky, Y. (2000) A Critical Condition in Fresnel Diffraction Used for Ultra-High Resolution Lithographic Printing. Journal of Physics D: Applied Physics, 33, 2133-2141.
https://doi.org/10.1088/0022-3727/33/17/307

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