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C. Tsamis, A. Tserepi and A. G. Nassiopoulou, “Thermal Properties of Suspended Porous Silicon Micro-Hotplates for Sensor Applications,” Sensors and Actuators B, Vol. 95, No. 1-3, 2003, pp. 78-82.
doi:10.1016/S0925-4005(03)00409-X
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