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Cho, S., Chasiotis, I., Friedmann, T.A. and Sullivan, J.P. (2005) Young’s Modulus, Poisson’s Ratio and Failure Properties of Tetrahedral Amorphous Diamond-Like Carbon for MEMS Devices. Journal of Micromechanics and Microengineering, 15, 728-735.
https://doi.org/10.1088/0960-1317/15/4/009
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