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Abadias, G., Chason, E., Keckes, J., Sebastiani, M., Thompson, G.B., Barthel, E., et al. (2018) Review Article: Stress in Thin Films and Coatings: Current Status, Challenges, and Prospects. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 36, Article 020801.
https://doi.org/10.1116/1.5011790

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