TITLE:
Modeling the Physical Parameters of Solenoids for MEMS Applications
AUTHORS:
Mykhaylo Andriychuk, Bohdan Karkulovskyi, Yarko Kuleshnyk
KEYWORDS:
EM Description, Motion Microdevice, Microsolenoid, Stored Energy, Computational Data
JOURNAL NAME:
Journal of Applied Mathematics and Physics,
Vol.12 No.5,
May
29,
2024
ABSTRACT: The paper is devoted to study of the electrical parameters of the motion parts of the MEMS such as solenoids. The analytical background is given in order to describe the influence of the electrical field components on the forces, which are result of interaction of the electromagnetic (EM) field components with the parts of motion devices of MEMS. The given analytical formulas open the ability to calculate the self-inductance of the microsolenoids of the different kind, as well as the stored energy of such motion devices, that could be used for the modeling and optimization of parameters of running devices of MEMS such as actuators, sensors etc.